Microstructure evolution of hydrogenated silicon thin films

Progress in Photovoltaics: Research and Applications

Volumn 4, Issue 3, 1996, Pages 165-192

  Hwang, H L ^a   Wang, K C ^a   Hsu, K C ^a   Yew, T R ^a   Loferski, J J ^a,b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b BROWN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAIN SIZE AND SHAPE; HYDROGENATION; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; POLYCRYSTALLINE MATERIALS; RAMAN SPECTROSCOPY; SILICON SOLAR CELLS; THIN FILMS; X RAY SPECTROSCOPY;

HYDROGEN DILUTION METHOD; MICROCRYSTALLINE FILMS; SILICON THIN FILMS;

AMORPHOUS SILICON;

EID: 0030143257     PISSN: 10627995     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1099-159X(199605/06)4:3<165::AID-PIP119>3.0.CO;2-M     Document Type: Article

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