Electronic properties and microstructure of undoped, and B- or P-doped polysilicon deposited by LPCVD

Solar Energy Materials and Solar Cells

Volumn 48, Issue 1-4, 1997, Pages 303-314

  Laghla, Y ^a   Scheid, E ^a   Vergnes, H ^b   Couderc, J P ^b  

^a LAAS CNRS   (France)

^b UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

B or P doped polysilicon; Electronic properties; Microstructure

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; ELECTRONIC PROPERTIES; POLYCRYSTALLINE MATERIALS;

B DOPED POLYSILICON; LOW PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD); P DOPED POLYSILICON;

SILICON SOLAR CELLS;

EID: 0031274955     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(97)00120-7     Document Type: Article

References (17)

1. H. Vergnes, E. Scheid, P. Duverneuil, J.P. Couderc, 10th European Conf. on CVD (CVD10), Venice, Italy 1995, J. Phys. II, 5 (Suppl.) pc5-997.
2. Y. Mishima, M. Hirose, Y. Osaka, J. Appl. Phys. 51 (1980) 1157.
3. G. Lubberts, B.C. Burkey, F. Moser, E.A. Trabka, J. Appl. Phys. 52 (1981) 6870.
4. M. Hirose, M. Taniguchi, Y. Osaka, J. Appl. Phys. 50 (1979) 377.
5. R.E. Jones Jr., S.P. Wesolowski, J. Appl. Phys. 56 (1984) 1701.
6. M.Y. Ghannam, R.W. Dutton, Appl. Phys. Lett. 52 (1988) 1222.
7. J.Y.M. Lee, I.C. Cheng, J. Appl. Phys. 53 (1982) 490.
8. B.S. Mayerson, W. Olbricht, J. Electrochem. Soc. 131 (1984) 2361.
9. F.C. Eversteyn, B.H. Put, J. Electrochem. Soc. 120 (1973) 106.
10. E.E. Chappelow, P.T. Lin, J. Electrochem. Soc. 123 (1976) 913.
11. C.M. Maritan, L.P. Berndt, N.G. Tarr, J.M. Bullerwell, G.M. Jenkins, J. Electrochem. Soc. 135 (1988) 1793.
12. D.D. Koleske, S.M. Gates, D.B. Beach, J. Appl. Phys. 72 (1992) 1073.
13. J.M. del Pozo, L. Diaz, Thin Solid Films 209 (1992) 137.
14. E. Elizalde, F. Rueda, Thin Solid Films 122 (1984) 45.
15. J.M. del Pozo, L. Diaz, Appl. Opt. 31 (1992) 4474.
16. J.I. Cisneros, G.B. Rego, M. Tomyiama, S. Bilac, J.M. Goncalves, A.E. Rodreguez, Z.P. Arguello, Thin Solid Films 100 (1983) 155.
17. D.F. Edwards, Handbook of Optical Constants of Solids (E.D. Palik, ed.), Naval Research Laboratory, Washington, D.C. (Academic Press, Inc., Harcourt Brace Jouvanovich), p. 547.