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Volumn 472, Issue 1-2, 2005, Pages 16-19

The effect of Sb surfactant assisted growth on SiGe surface morphology

(2) Jernigan, Glenn G a Thompson, Phillip E a

a NAVAL RESEARCH LABORATORY (United States)

Author keywords

Ge segregation; Molecular beam epitaxy; Scanning tunneling microscopy; Si (100); SiGe heteroepitaxy; Surface morphology; Surfactant assisted growth

Indexed keywords

ANTIMONY; FILM GROWTH; MOLECULAR BEAM EPITAXY; MORPHOLOGY; SCANNING TUNNELING MICROSCOPY; SEGREGATION (METALLOGRAPHY); SILICON COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

GE SEGREGATION; SI (100); SIGE HETEROEPITAXY; SURFACTANT ASSISTED GROWTH;

SURFACE ACTIVE AGENTS;

EID: 9944224652 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2004.05.117 Document Type: Article

Times cited : (4)

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