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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 5, 2001, Pages 2307-2311

Temperature dependence of atomic scale morphology in Si homoepitaxy between 350 and 800°C on Si (100) by molecular beam epitaxy

(2) Jernigan, G G a Thompson, P E a

a NAVAL RESEARCH LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; DEPOSITION; ELECTRON TRANSITIONS; MOLECULAR BEAM EPITAXY; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTOR GROWTH; THERMAL EFFECTS;

ATOMIC SCALE MORPHOLOGY; HOMOEPITAXY;

SEMICONDUCTING SILICON;

EID: 0035442689 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1384559 Document Type: Article

Times cited : (8)

References (38)

1
- 16644392651
- (1986) Phys. Rev. B , vol.34 , pp. 5343
- Hamers, R.J.¹ Tromp, R.M.² Demuth, J.E.³

2
- 27844561258
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 195
- Hamers, R.J.¹ Kohler, U.K.² Demuth, J.E.³

3
- 35949011121
- (1989) Phys. Rev. Lett. , vol.63 , pp. 2393
- Mo, Y.-W.¹ Swartzentruber, B.S.² Kariotis, R.³ Webb, M.B.⁴ Lagally, M.G.⁵

4
- 84918182707
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 201
- Mo, Y.-W.¹ Kariotis, R.² Swartzentruber, B.S.³ Webb, M.B.⁴ Lagally, M.G.⁵

5
- 0026170685
- (1991) Surf. Sci. , vol.248 , pp. 313
- Mo, Y.-W.¹ Lagally, M.G.²

6
- 84912945447
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 207
- Hoeven, A.J.¹ Dijkkamp, D.² Van Loenen, E.J.³ Lenssinck, J.M.⁴ Dieleman, J.⁵

7
- 84957232144
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 218
- Dijkkamp, D.¹ Van Loenen, E.J.² Hoeven, A.J.³ Dieleman, J.⁴

8
- 30544439683
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 2901
- Swartzentruber, B.S.¹ Mo, Y.-W.² Webb, M.B.³ Lagally, M.G.⁴

9
- 84957228545
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 210
- Swartzentruber, B.S.¹ Mo, Y.W.² Webb, M.B.³ Lagally, M.G.⁴

10
- 0032621145
- (1999) Appl. Phys. Lett. , vol.75 , pp. 1308
- Thompson, P.E.¹

11
- 0029633724
- (1995) J. Cryst. Growth , vol.157 , pp. 215
- Hobart, K.D.¹ Kub, F.J.² Papanicoloau, N.A.³ Kruppa, W.⁴ Thompson, P.E.⁵

12
- 0025596726
- (1990) Thin Solid Films , vol.192 , pp. 287
- Richmond, E.D.¹ Pellegrino, J.G.² Twigg, M.E.³ Qadri, S.⁴ Dully, M.T.⁵

13
- 0003240183
- McAllister Technical Services, Coere d'Alene Idaho 83815
- (1998)

14
- 0001265002
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 830
- Ventrice C.A., Jr.¹ LaBella, V.P.² Schowalter, L.J.³

15
- 0000466502
- (1993) J. Vac. Sci. Technol. B , vol.11 , pp. 1077
- Thompson, P.E.¹ Twigg, M.E.² Godbey, D.J.³ Hobart, K.D.⁴ Simons, D.S.⁵

16
- 0001599960
- (2000) Appl. Phys. Lett. , vol.76 , pp. 463
- Arima, K.¹

17
- 4243333499
- (1997) Surf. Sci. , vol.377-379 , pp. 1
- Zandvliet, H.J.W.¹

18
- 84915938885
- (1988) J. Microsc. , vol.152 , pp. 735
- Niehus, H.¹ Köhler, U.K.² Copel, M.³ Demuth, J.E.⁴

19
- 0000022335
- (1995) Phys. Rev. B , vol.52 , pp. 17269
- Koo, J.-Y.¹

20
- 0003056137
- (1988) Surf. Sci. , vol.194
- Kato, K.¹ Ide, T.² Miura, S.³ Tamura, A.⁴ Ichinokawa, T.⁵

21
- 0000579343
- (1997) Phys. Rev. B , vol.55 , pp. 9352
- Van Wingerden, J.¹ Van Dam, A.² Haye, M.J.³ Scholte, P.M.L.O.⁴ Tunistra, F.⁵

22
- 0034341834
- (2000) Rev. Mod. Phys. , vol.72 , pp. 593
- Zandvliet, H.J.W.¹

23
- 24544453940
- (1987) Phys. Rev. Lett. , vol.59 , pp. 1691
- Chadi, D.J.¹

24
- 0022665093
- (1987) J. Cryst. Growth , vol.81 , pp. 59
- Sakamoto, T.¹

25
- 6244251920
- (1995) J. Appl. Phys. , vol.77 , pp. 3597
- Eaglesham, D.J.¹

26
- 36449002434
- (1993) Appl. Phys. Lett. , vol.63 , pp. 3055
- Voigtländer, B.¹ Zinner, A.²

27
- 0000832935
- (1995) Phys. Rev. B , vol.51 , pp. 7583
- Voigtländer, B.¹ Zinner, A.² Weber, T.³ Bonzel, H.P.⁴

28
- 0030412291
- (1996) Appl. Phys. A: Mater. Sci. Process. , vol.63 , pp. 577
- Voigtländer, B.¹ Kästner, M.²

29
- 0043224031
- (1997) Phys. Rev. Lett. , vol.78 , pp. 2164
- Voigtländer, B.¹ Weber, T.² Smilauer, P.³ Wolf, D.E.⁴

30
- 0032099237
- (1998) J. Cryst. Growth , vol.188 , pp. 1
- Swartzentruber, B.S.¹

31
- 0001127966
- (1997) Phys. Rev. B , vol.55 , pp. 4723
- Van Wingerden, J.¹ Van Dam, A.² Haye, M.J.³ Scholte, P.M.L.O.⁴ Tuinstra, F.⁵

32
- 0030141694
- (1996) Surf. Sci. , vol.352-354 , pp. 641
- Van Wingerden, J.¹ Van Halen, E.C.² Werner, K.³ Scholte, P.M.L.O.⁴ Tuinstra, F.⁵

33
- 0000518968
- (1996) Phys. Rev. Lett. , vol.76 , pp. 2306
- Pearson, C.¹ Krueger, M.² Ganz, E.³

34
- 0031645295
- (1998) Surf. Sci. , vol.402-404 , pp. 831
- Lin, D.-S.¹

35
- 0022699183
- (1986) J. Electrochem. Soc. , vol.133 , pp. 666
- Ishizaka, A.¹ Shiraki, Y.²

36
- 0027554707
- (1993) Jpn. J. Appl. Phys. , vol.32 , Issue.PART 1 , pp. 1368
- Tokumoto, H.¹ Iwatsuki, M.²

37
- 0030172354
- (1996) Surf. Sci. , vol.356 , pp. 101
- Yang, Y.N.¹ Fu, E.S.² Williams, E.D.³

38
- 0000985066
- (1995) Phys. Rev. Lett. , vol.74 , pp. 3648
- Bedrossian, P.J.¹

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