Sb segregation in Si and SiGe: Effect on the growth of self-organized Ge dots

Thin Solid Films

Volumn 380, Issue 1-2, 2000, Pages 164-168

  Portavoce, A ^a,b   Volpi, F ^a   Ronda, A ^a   Gas, P ^b   Berbezier, I ^a  

^a AIX MARSEILLE UNIVERSITÉ   (France)

^b AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; FILM GROWTH; MOLECULAR BEAM EPITAXY; REACTION KINETICS; SEGREGATION (METALLOGRAPHY); SEMICONDUCTING ANTIMONY; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DOPING; SEMICONDUCTOR QUANTUM DOTS; SURFACE ACTIVE AGENTS;

SURFACTANT MEDIATED GROWTH;

SEMICONDUCTING FILMS;

EID: 0034497764     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01494-2     Document Type: Article

References (26)

1. Abdallah M., Berbezier I., Dawson P., Serpentini M., Bremond G., Joyce B. Thin Solid Films. 336:1998;256.
2. Mo Y.-W., Savage D.E., Swartzentruber B.S., Lagally M.G. Phys. Rev. Lett. 65:1990;1020.
3. Pedersen E.V., Shiryaev S.Yu., Jensen F., Lundsgaard Hansen J., Petersen J.W. Surf. Sci. 399:1998;L351.
4. Sunamura H., Usami N., Shiraki Y., Fukatsu S. Appl. Phys. Lett. 66:1995;3024.
5. Berbezier I., Abdallah M., Ronda A., Bremond G. Mat. Sci. Eng. B. 69-70:2000;367.
6. Eberl K., Schmidt O.G., Kienzele O., Ernst F. Sol. State Phenomena. 70:1999;13.
7. Ryland R.G., Hasegawa S., Williams E.D. Surf. Sci. 345:1996;222.
8. Sakamoto K., Miki K., Sakamoto T., Matsuhata H., Kyoya K. J. Cryst. Growth. 127:1993;392.
9. Markov, Phys. Rev. B 50 (1994) 11271.
10. Oh C.W., Kim E., Lee Y.H. Phys. Rev. Lett. 76:1996;776.
11. Kandel D., Kaxiras E. Phys. Rev. Lett. 75:1995;2742.
12. Thorton J.M.C., Williams A.A., Macdonald J.E., van Silfhout R.G., van der Veen J.F., Finney M., Norris C. J. Vac. Sci. Technol. B. 9:1991;2146.
13. Jenkins S.J., Srivastava G.P. Surf. Sci. 398:1998;L308.
14. Eaglesham D.J., Unterwald F.C., Jacobson D.C. Phys. Rev. Lett. 70:1993;966.
15. Horn von Hoegen M., Pook M., Al Falou A., Müller B.H., Henzler M. Surf. Sci. 284:1993;53.
16. Horn-von-Hoegen M., Al Falou A., Müller B.H., Köhler U., Andersohn L., Dahlheimer B., Henzler M. Phys. Rev. B. 49:1994;2637.
17. Falkenberg G., Seehofer L., Johnson R.L. Surf. Sci. 377-379:1997;75.
18. Jankins S.J., Srivastava G.P. Surf. Sci. 398:1998;L308.
19. Fujita K., Fukatsu S., Usami N., shiraki Y., Yaguchi H., Ito R., Nakagawa K. Surf. Sci. 295:1993;335.
20. Berbezier I., Gallas B., Fernandez J., Joyce B. Semicond. Sci. Technol. 14:1999;198.
21. Ni W.-X., Hansson G.V., Cardenas J., Svensson B.G. Thin Solid Films. 321:1998;131.
22. Ushio J., Nakagawa K., Miyao M., Maruizumi T. Phys. Rev. B. 58:1998;3932.
23. Markov I. Phys Rev. B. 50:1994;11271.
24. Oppo S., Fiorentini V., Scheffler M. Phys. Rev. B. 71:1993;2437.
25. Kandel D., Kaxiras E. Phys. Rev. B. 75:1995;2742.
26. De Padova P., Larciprete R., Quaresima C., Ottaviani C., Comicioli C., Crotti C., Hakanson M.C., Peloi M., Ressel B., Perfetti P. Appl. Surf. Sci. 123-124:1998;641.