Stress-induced self-organization of nanoscale structures in SiGe/Si multilayer films

Physical Review B - Condensed Matter and Materials Physics

Volumn 53, Issue 24, 1996, Pages 16334-16337

  Teichert, C ^a   Lagally, M ^a   Peticolas, L ^b   Bean, J ^b  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2842567225     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.53.16334     Document Type: Article

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