Size measurements of standard nanoparticles using metrological atomic force microscope and evaluation of their uncertainties

Precision Engineering

Volumn 51, Issue , 2018, Pages 691-701

  Misumi, Ichiko ^a   Sugawara, Kentaro ^a   Takahata, Keiji ^a   Takahashi, Kayori ^a   Ehara, Kensei ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Metrological AFM; Particle deformation; Particle size measurement; Plastic model; Uncertainty

Indexed keywords

ATOMIC FORCE MICROSCOPY; INTERFEROMETERS; LASER INTERFEROMETRY; NANOPARTICLES; SEMICONDUCTOR DEVICE MANUFACTURE; SILVER; SUBSTRATES; UNCERTAINTY ANALYSIS;

CONVENTIONAL METHODS; LASER INTERFEROMETER; METROLOGICAL ATOMIC FORCE MICROSCOPE; PARTICLE DEFORMATION; PARTICLE SIZE MEASUREMENT; PLASTIC MODELS; SEMICONDUCTOR INDUSTRY; UNCERTAINTY;

PARTICLE SIZE;

EID: 85034108524     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2017.11.013     Document Type: Article

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