Profile surface roughness measurement using metrological atomic force microscope and uncertainty evaluation

Measurement: Journal of the International Measurement Confederation

Volumn 73, Issue , 2015, Pages 295-303

  Misumi, Ichiko ^a   Naoi, Kazuya ^a   Sugawara, Kentaro ^a   Gonda, Satoshi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Calibration; Metrological AFM; Surface roughness; Traceability; Uncertainty

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; NANOPROBES; ROUGHNESS MEASUREMENT; SURFACE PROPERTIES; SURFACE TREATMENT; TESTING; THIN FILMS; UNCERTAINTY ANALYSIS;

AFM; CERAMIC THIN FILMS; JAPANESE INDUSTRIAL STANDARDS; METROLOGICAL ATOMIC FORCE MICROSCOPE; THIN FILM FABRICATION; TRACEABILITY; UNCERTAINTY; UNCERTAINTY EVALUATION;

SURFACE ROUGHNESS;

EID: 84935898382     PISSN: 02632241     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.measurement.2015.05.026     Document Type: Article

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