Three dimensional accurate morphology measurements of polystyrene standard particles on silicon substrate by electron tomography

Micron

Volumn 79, Issue , 2015, Pages 53-58

  Hayashida, Misa ^a,b   Kumagai, Kazuhiro ^a   Malac, Marek ^b,c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^c UNIVERSITY OF ALBERTA   (Canada)

Author keywords

(Scanning) Transmission electron microscopy ((S)TEM); Accurate shape measurement; Calibration sample; Electron tomography; Metrology; Nanoparticle deformation; Polystyrene latex spheres; Quantitative electron tomography; Surface energy

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; DEFORMATION; DYNAMIC LIGHT SCATTERING; ELECTRIC IMPEDANCE TOMOGRAPHY; ELECTRONS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; INTERFACIAL ENERGY; MEASUREMENT; MICA; NANOPARTICLES; PARTICLE SIZE; PARTICLE SIZE ANALYSIS; POLYSTYRENES; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; TRANSMISSIONS;

(SCANNING) TRANSMISSION ELECTRON MICROSCOPY ((S)TEM); CALIBRATION SAMPLES; ELECTRON TOMOGRAPHY; POLYSTYRENE LATEX SPHERES; SHAPE MEASUREMENTS;

MORPHOLOGY;

EID: 84940653568     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micron.2015.08.003     Document Type: Article

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