Effects of angle misalignments on pitch measurements of two-dimensional gratings using an AFM

Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao

Volumn 27, Issue 5, 2006, Pages 531-534

  Sugawara, Kentaro ^a   Sato, Osamu ^a   Yoshizaki, Kazunori ^a   Misumi, Ichiko ^a   Gonda, Satoshi ^a   Takatsuji, Toshiyuki ^a   Kitta, Jun Ichiro ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Japan Quality Assurance Organization JQA   (Japan)

Author keywords

Atomic force microscope; Nanometrology; Two dimensional grating; Uncertainty

Indexed keywords

EID: 34547618649     PISSN: 02579731     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)