Foil-to-foil system integration through capillary self-alignment directed by laser patterning

Journal of Microelectromechanical Systems

Volumn 24, Issue 1, 2015, Pages 126-133

  Arutinov, Gari ^a   Mastrangeli, Massimo ^b,c   Smits, Edsger C P ^a   Van Heck, Gert ^a   Den Toonder, Jaap M J ^d   Dietzel, Andreas ^e  

^a TNO   (Netherlands)

^b EPFL   (Switzerland)

^c UNIVERSITÉ LIBRE DE BRUXELLES   (Belgium)

^d EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^e TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Capillarity; fluidics; foil to foil integration; self alignment; self assembly

Indexed keywords

ALIGNMENT; CAPACITIVE SENSORS; CAPILLARITY; COST EFFECTIVENESS; FLUIDICS; SELF ASSEMBLY; TOPOLOGY;

ALIGNMENT ACCURACY; CAPACITIVE HUMIDITY SENSORS; CONDUCTIVE ADHESIVE; ELECTRICAL INTERCONNECTIONS; INTEGRATION TECHNOLOGIES; MECHANICAL AND ELECTRICAL INTEGRATIONS; SELF ALIGNMENT; SURFACE STRUCTURING;

INTEGRAL EQUATIONS;

EID: 85028157516     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2014.2321013     Document Type: Article

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