Capillary self-alignment of mesoscopic foil components for sensor-systems-in-foil

Journal of Micromechanics and Microengineering

Volumn 22, Issue 11, 2012, Pages

  Arutinov, Gari ^a,b   Smits, Edsger C P ^a   Mastrangeli, Massimo ^c   Van Heck, Gert ^a   Van Den Brand, Jeroen ^a   Schoo, Herman F M ^a   Dietzel, Andreas ^d  

^a HOLST CENTRE   (Netherlands)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c EPFL   (Switzerland)

^d TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MESOSCOPICS; SELF ALIGNMENT; SMART ELECTRONICS; TIME WINDOWS;

ENGINEERING; MICROMECHANICS;

ALIGNMENT;

EID: 84867956733     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/11/115022     Document Type: Article

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