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Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas
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Hebner G A 1996 Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas J. Appl. Phys. 80 2624-36
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(1996)
J. Appl. Phys.
, vol.80
, pp. 2624-2636
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Hebner, G.A.1
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