Application of the escape factor method for determination of excited states densities in a low-pressure argon radio-frequency discharge

Contributions to Plasma Physics

Volumn 53, Issue 7, 2013, Pages 549-559

  Sushkov, V P ^a   Do, H T ^a   Hippler, R ^a  

^a UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

Emission spectroscopy; Escape factor; Metastable state; Rf discharge in argon; TDLAS

Indexed keywords

ABSORPTION SPECTROSCOPY; EMISSION SPECTROSCOPY; RADIO WAVES;

EMITTED LIGHT; ESCAPE FACTORS; EXCITED STATE DENSITIES; FACTOR METHODS; LOW PRESSURES; META-STABLE STATE; RADIO FREQUENCY DISCHARGES; RF DISCHARGE; RF DISCHARGE IN ARGON; TDLAS;

ARGON;

EID: 84881563717     PISSN: 08631042     EISSN: 15213986     Source Type: Journal    
DOI: 10.1002/ctpp.201200114     Document Type: Article

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