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Volumn 23, Issue 1, 2014, Pages

Measurement of the Ar(1sy) state densities by two OES methods in Ar-N2 discharges

Author keywords

[No Author keywords available]

Indexed keywords

BAND METHODS; BRANCHING FRACTIONS; DC DISCHARGES; LINE INTENSITIES; MEASUREMENTS OF; OPTICAL EMISSION SPECTROSCOPIES (OES); SECOND POSITIVE SYSTEMS; STATE DENSITIES;

EID: 84893644114     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/23/1/015014     Document Type: Article
Times cited : (9)

References (40)
  • 1
    • 0028447331 scopus 로고
    • Correlations between active species density and iron nitride layer growth in Ar-N2-H2 microwave post-discharges
    • 10.1088/0022-3727/27/6/034 0022-3727 034
    • Malvos H, Michel H and Ricard A 1994 Correlations between active species density and iron nitride layer growth in Ar-N2-H2 microwave post-discharges J. Phys. D: Appl. Phys. 27 1328
    • (1994) J. Phys. D: Appl. Phys. , vol.27 , Issue.6 , pp. 1328
    • Malvos, H.1    Michel, H.2    Ricard, A.3
  • 2
    • 53349153619 scopus 로고    scopus 로고
    • Study on the influence of nitrogen on titanium nitride in a dc post magnetron sputtering plasma system
    • 10.1088/0022-3727/41/19/195205 0022-3727 195205
    • Borah S M, Bailung H, Pal A R and Chutia J 2008 Study on the influence of nitrogen on titanium nitride in a dc post magnetron sputtering plasma system J. Phys. D: Appl. Phys. 41 195205
    • (2008) J. Phys. D: Appl. Phys. , vol.41 , Issue.19
    • Borah, S.M.1    Bailung, H.2    Pal, A.R.3    Chutia, J.4
  • 4
    • 77949667282 scopus 로고    scopus 로고
    • Gas temperature and electron density profiles in an argon dc microdischarge measured by optical emission spectroscopy
    • 10.1063/1.3318498 053305
    • Belostotskiy S G, Ouk T, Donnelly V M, Economou D J and Sadeghi N 2010 Gas temperature and electron density profiles in an argon dc microdischarge measured by optical emission spectroscopy J. Appl. Phys. 107 053305
    • (2010) J. Appl. Phys. , vol.107
    • Belostotskiy, S.G.1    Ouk, T.2    Donnelly, V.M.3    Economou, D.J.4    Sadeghi, N.5
  • 5
    • 34547372993 scopus 로고    scopus 로고
    • Experimental and theoretical study of the effect of gas flow on gas temperature in an atmospheric pressure microplasma
    • DOI 10.1088/0022-3727/40/14/015, PII S0022372707472072, 015
    • Wang Q, Doll F, Donnelly V M, Economou D J, Sadeghi N and Franz G F 2007 Experimental and theorical study of the effect of gas flow on gas temperature in atmospheric pressure microplasma J. Phys. D: Appl. Phys. 40 4202-11 (Pubitemid 47134557)
    • (2007) Journal of Physics D: Applied Physics , vol.40 , Issue.14 , pp. 4202-4211
    • Wang, Q.1    Doll, F.2    Donnelly, V.M.3    Economou, D.J.4    Sadeghi, N.5    Franz, G.F.6
  • 7
    • 84867242679 scopus 로고    scopus 로고
    • Spectroscopic diagnostics and modelling of a N2-Ar mixture discharge created by an RF helical coupling device: II. Vibrational distribution of the N2(C 3Πu, v′) state
    • 10.1088/0963-0252/21/5/055022 0963-0252 055022
    • Annušová A, Foissac C, Krištof J, Veis P and Supiot P 2012 Spectroscopic diagnostics and modelling of a N2-Ar mixture discharge created by an RF helical coupling device: II. Vibrational distribution of the N2(C 3Πu, v′) state Plasma Sources Sci. Technol. 21 055022
    • (2012) Plasma Sources Sci. Technol. , vol.21 , Issue.5
    • Annušová, A.1    Foissac, C.2    Krištof, J.3    Veis, P.4    Supiot, P.5
  • 8
    • 0036571953 scopus 로고    scopus 로고
    • 2-Ar discharge. II. Experiment and comparison with theory
    • DOI 10.1063/1.1462843
    • Henriques J, Taratova E, Dias F M and Ferreira C M 2002 Wave driven N2-Ar discharge: II. Experiment and comparison with theory J. Appl. Phys. 91 5632-9 (Pubitemid 34562208)
    • (2002) Journal of Applied Physics , vol.91 , Issue.9 , pp. 5632
    • Henriques, J.1    Tatarova, E.2    Dias, F.M.3    Ferreira, C.M.4
  • 9
    • 80051608681 scopus 로고    scopus 로고
    • Modeling and experimental study of molecular nitrogen dissociation in an Ar-N2 ICP discharge
    • 10.1088/0963-0252/20/4/045015 0963-0252 045015
    • Kang N, Gaboriau F, Oh S and Ricard A 2011 Modeling and experimental study of molecular nitrogen dissociation in an Ar-N2 ICP discharge Plasma Sources Sci. Technol. 20 045015
    • (2011) Plasma Sources Sci. Technol. , vol.20 , Issue.4
    • Kang, N.1    Gaboriau, F.2    Oh, S.3    Ricard, A.4
  • 10
    • 84880885734 scopus 로고    scopus 로고
    • Time-resolved temperature study in a high-power impulse magnetron sputtering discharge
    • 10.1063/1.4812579 013301
    • Britun N, Palmucci M, Konstantinidis S, Gaillard M and Snyders R 2013 Time-resolved temperature study in a high-power impulse magnetron sputtering discharge J. Appl. Phys. 114 013301
    • (2013) J. Appl. Phys. , vol.114
    • Britun, N.1    Palmucci, M.2    Konstantinidis, S.3    Gaillard, M.4    Snyders, R.5
  • 11
    • 79960219378 scopus 로고    scopus 로고
    • The spatially resolved measurements of the atomic densities in argon Paschen 1s levels by OES in a capacitively coupled plasma
    • 10.1088/0022-3727/44/29/292001 0022-3727 292001
    • Li J, Liu F, Zhu X and Pu Y 2011 The spatially resolved measurements of the atomic densities in argon Paschen 1s levels by OES in a capacitively coupled plasma J. Phys. D: Appl. Phys. 44 292001
    • (2011) J. Phys. D: Appl. Phys. , vol.44 , Issue.29
    • Li, J.1    Liu, F.2    Zhu, X.3    Pu, Y.4
  • 12
    • 79953653740 scopus 로고    scopus 로고
    • Time- and space-resolved measurements of Ar(1s5) metastable density in a microplasma using diode laser absorption spectroscopy
    • 10.1088/0022-3727/44/14/145202 0022-3727 145202
    • Belostotskiy S G, Ouk T, Donnelly V M, Economou D J and Sadeghi N 2011 Time- and space-resolved measurements of Ar(1s5) metastable density in a microplasma using diode laser absorption spectroscopy J. Phys. D: Appl. Phys. 44 145202
    • (2011) J. Phys. D: Appl. Phys. , vol.44 , Issue.14
    • Belostotskiy, S.G.1    Ouk, T.2    Donnelly, V.M.3    Economou, D.J.4    Sadeghi, N.5
  • 14
    • 84876392301 scopus 로고    scopus 로고
    • Density of atoms in Ar*(3p54s) states and gas temperatures in an argon surfatron plasma measured by tunable laser spectroscopy
    • 10.1063/1.4799152 143306
    • Hubner S, Sadeghi N, Carbone E A D and van der Mullen J J A M 2013 Density of atoms in Ar*(3p54s) states and gas temperatures in an argon surfatron plasma measured by tunable laser spectroscopy J. Appl. Phys. 113 143306
    • (2013) J. Appl. Phys. , vol.113
    • Hubner, S.1    Sadeghi, N.2    Carbone, E.A.D.3    Van Der Mullen, J.J.A.M.4
  • 15
    • 2942567762 scopus 로고    scopus 로고
    • Determination of the non-relaxation (reflection) probability of metastable Ar(3P2) atoms on a Pyrex surface
    • 10.1088/0963-0252/13/2/016 0963-0252 016
    • Macko P and Sadeghi N 2004 Determination of the non-relaxation (reflection) probability of metastable Ar(3P2) atoms on a Pyrex surface Plasma Sources Sci. Technol. 13 303
    • (2004) Plasma Sources Sci. Technol. , vol.13 , Issue.2 , pp. 303
    • Macko, P.1    Sadeghi, N.2
  • 16
    • 43049100776 scopus 로고    scopus 로고
    • Production of Ar metastable atoms in the late afterglow of pulse-modulated rf magnetron sputtering plasmas
    • DOI 10.1088/0022-3727/41/3/035206, PII S002237270865531X
    • Nafarizal N, Takada N and Sasaki K 2008 Production of ar metastable atoms in the late afterglow of pulse-modulated rf magnetron sputtering plasmas J. Phys. D: Appl. Phys. 41 035206 (Pubitemid 351622880)
    • (2008) Journal of Physics D: Applied Physics , vol.41 , Issue.3 , pp. 035206
    • Nafarizal, N.1    Takada, N.2    Sasaki, K.3
  • 17
    • 68649114144 scopus 로고    scopus 로고
    • Measurement of metastable and resonance level densities in rare-gas plasmas by optical emission spectroscopy
    • 10.1088/0963-0252/18/3/035017 0963-0252 035017
    • Boffard J B, Jung R O, Lin C C and Wendt A E 2009 Measurement of metastable and resonance level densities in rare-gas plasmas by optical emission spectroscopy Plasma Sources Sci. Technol. 18 035017
    • (2009) Plasma Sources Sci. Technol. , vol.18 , Issue.3
    • Boffard, J.B.1    Jung, R.O.2    Lin, C.C.3    Wendt, A.E.4
  • 18
    • 0024656603 scopus 로고
    • A collisional-radiative model applicable to argon dischrages over a wide range of conditions: II. Application to low-pressure, hollow-cathode arc and low-pressure glow discharge
    • 10.1088/0022-3727/22/5/010 0022-3727 010
    • Vlcek J and Pelikán V 1989 A collisional-radiative model applicable to argon dischrages over a wide range of conditions: II. Application to low-pressure, hollow-cathode arc and low-pressure glow discharge J. Phys. D: Appl. Phys. 22 632-43
    • (1989) J. Phys. D: Appl. Phys. , vol.22 , Issue.5 , pp. 632-643
    • Vlcek, J.1    Pelikán, V.2
  • 19
    • 3042543180 scopus 로고    scopus 로고
    • Application of excitation cross sections to optical plasma diagnostics
    • 10.1088/0022-3727/37/12/R01 0022-3727 R01
    • Boffard J B, Lin C C and DeJoseph C A Jr 2004 Application of excitation cross sections to optical plasma diagnostics J. Phys. D: Appl. Phys. 37 R143-61
    • (2004) J. Phys. D: Appl. Phys. , vol.37 , Issue.12
    • Boffard, J.B.1    Lin, C.C.2    DeJoseph Jr., C.A.3
  • 20
    • 79960266273 scopus 로고    scopus 로고
    • Determination of the metastable level densities in a low-pressure inductively coupled argon plasma by the line-ratio method of optical emission spectroscopy
    • 10.1088/0022-3727/44/28/285203 0022-3727 285203
    • Li J, Liu F, Zhu X and Pu Y 2011 Determination of the metastable level densities in a low-pressure inductively coupled argon plasma by the line-ratio method of optical emission spectroscopy J. Phys. D: Appl. Phys. 44 285203
    • (2011) J. Phys. D: Appl. Phys. , vol.44 , Issue.28
    • Li, J.1    Liu, F.2    Zhu, X.3    Pu, Y.4
  • 21
    • 40549113709 scopus 로고    scopus 로고
    • A robust method to measure metastable and resonant state densities from emission spectra in argon and argon-diluted low pressure plasmas
    • DOI 10.1088/0022-3727/41/6/065206, PII S0022372708503445
    • Schulze M, Yanguas-Gil A, von Keudell A and Awakowicz P 2008 A robust method to measure metastable and resonant state densities from emission spectra in argon and argon-diluted low pressure plasmas J. Phys. D: Appl. Phys. 41 065206 (Pubitemid 351365355)
    • (2008) Journal of Physics D: Applied Physics , vol.41 , Issue.6 , pp. 065206
    • Schulze, M.1    Yanguas-Gil, A.2    Von Keudell, A.3    Awakowicz, P.4
  • 22
    • 0002807456 scopus 로고
    • Rotational and vibrational distribution of N2(C 3Πu) excitation by state-selected Ar(3P2) and Ar(3P0) metastable atoms
    • 10.1016/0301-0104(83)85137-4 0301-0104
    • Nguyen T D and Sadeghi N 1983 Rotational and vibrational distribution of N2(C 3Πu) excitation by state-selected Ar(3P2) and Ar(3P0) metastable atoms Chem. Phys. 79 41-55
    • (1983) Chem. Phys. , vol.79 , pp. 41-55
    • Nguyen, T.D.1    Sadeghi, N.2
  • 23
    • 36849112029 scopus 로고
    • Chemical applications of metastable argon atom: IV. Excitation and relaxation of triplet state of N2
    • 10.1063/1.1674088
    • Setser D W and Stedman D H 1970 Chemical applications of metastable argon atom: IV. Excitation and relaxation of triplet state of N2 J. Chem. Phys. 53 1004-20
    • (1970) J. Chem. Phys. , vol.53 , pp. 1004-1020
    • Setser, D.W.1    Stedman, D.H.2
  • 24
    • 80052533406 scopus 로고    scopus 로고
    • Study of the excitation mechanisms of the second positive system in the negative glow of a N2-Ar discharge
    • 10.1088/0022-3727/44/37/375204 375204
    • Isola L M, Lopez M and Gómez B J 2011 Study of the excitation mechanisms of the second positive system in the negative glow of a N2-Ar discharge J. Phys. D: Appl. Phys. 43 375204
    • (2011) J. Phys. D: Appl. Phys. , vol.43
    • Isola, L.M.1    Lopez, M.2    Gómez, B.J.3
  • 25
    • 36749111760 scopus 로고
    • Symmetries, propensity rules, and alternation intensity in the rotational spectrum of N2(C 3Πu) excited by metastables Ar(P0,2)
    • 10.1063/1.439129
    • Derouard J, Nguyen T D and Sadeghi N 1980 Symmetries, propensity rules, and alternation intensity in the rotational spectrum of N2(C 3Πu) excited by metastables Ar(P0,2) J. Chem. Phys. 12 6698-705
    • (1980) J. Chem. Phys. , vol.12 , pp. 6698-6705
    • Derouard, J.1    Nguyen, T.D.2    Sadeghi, N.3
  • 26
    • 84893645947 scopus 로고    scopus 로고
    • Isola L 2012 Caracterización del brillo negativo de plasmas de N2, Ar y N2-Ar, mediante OES y sonda Langmuir PhD Thesis Universidad Nacional de Rosario, Facultad de Ciencias Exactas, Ingeniería y Agrimensura
    • (2012) PhD Thesis
    • Isola, L.1
  • 27
    • 3242670869 scopus 로고    scopus 로고
    • Two populations with different Boltzmann distribution of the rotational levels found in different types of N2/Ar discharges improved estimation of the neutral gas temperature
    • 10.1088/0022-3727/37/14/008 0022-3727 008
    • Linss V, Kupfer H, Peter S and Richter F 2004 Two populations with different Boltzmann distribution of the rotational levels found in different types of N2/Ar discharges improved estimation of the neutral gas temperature J. Phys. D: Appl. Phys. 37 1935-44
    • (2004) J. Phys. D: Appl. Phys. , vol.37 , Issue.14 , pp. 1935-1944
    • Linss, V.1    Kupfer, H.2    Peter, S.3    Richter, F.4
  • 28
    • 84898960456 scopus 로고
    • Frack-Condon fators, r-centroids, electronics transition moments, and Einstein coeficient for many nitrogen and oxigen band systems
    • 10.1063/1.555910
    • Gilmore F R, Laher R R and Espy P J 1992 Frack-Condon fators, r-centroids, electronics transition moments, and Einstein coeficient for many nitrogen and oxigen band systems J. Phys. Chem. Ref. Data 21 1005-107
    • (1992) J. Phys. Chem. Ref. Data , vol.21 , pp. 1005-1107
    • Gilmore, F.R.1    Laher, R.R.2    Espy, P.J.3
  • 29
    • 0005534693 scopus 로고
    • Measurements of relative transition probabilities and the variation of the electronic transition moment for N2C 3Πu-B 3Πg second positive system
    • 10.1088/0022-3700/11/9/013 0022-3700
    • Hartmann G and Johnson P C 1978 Measurements of relative transition probabilities and the variation of the electronic transition moment for N2C 3Πu-B 3Πg second positive system J. Phys. B: At. Mol. Phys. 9 1597-612
    • (1978) J. Phys. B: At. Mol. Phys. , vol.9 , pp. 1597-1612
    • Hartmann, G.1    Johnson, P.C.2
  • 31
    • 0040574228 scopus 로고
    • Comparison of the Ar(3P2) and Ar(3P0) reactions with chlorine and fluorine containing molecules: Propensity for ion-core conservation
    • 10.1063/1.456691
    • Sadeghi N, Cheaib M and Setsers D W 1989 Comparison of the Ar(3P2) and Ar(3P0) reactions with chlorine and fluorine containing molecules: Propensity for ion-core conservation J. Chem. Phys. 90 219-31
    • (1989) J. Chem. Phys. , vol.90 , pp. 219-231
    • Sadeghi, N.1    Cheaib, M.2    Setsers, D.W.3
  • 32
    • 0003537932 scopus 로고
    • The escape factor in plasma spectroscopy: I. The escape factor defined and evaluated
    • 10.1016/0022-4073(79)90102-X 0022-4073
    • Irons F E 1979 The escape factor in plasma spectroscopy: I. The escape factor defined and evaluated J. Quant. Spectrosc. Radiat. Transfer. 22 1-20
    • (1979) J. Quant. Spectrosc. Radiat. Transfer. , vol.22 , pp. 1-20
    • Irons, F.E.1
  • 33
    • 0141595369 scopus 로고
    • Relative intensity of helium spectral lines as a function of electron temperature and density
    • 10.1088/0508-3443/18/1/315 0508-3443 315
    • Mewe R 1967 Relative intensity of helium spectral lines as a function of electron temperature and density Br. J. Appl. Phys. 18 107
    • (1967) Br. J. Appl. Phys. , vol.18 , Issue.1 , pp. 107
    • Mewe, R.1
  • 34
    • 72449209893 scopus 로고    scopus 로고
    • Determination of the electron temperature and density in the negative glow of a nitrogen pulsed discharge using optical emission spectroscopy
    • 10.1088/0022-3727/43/1/015202 0022-3727 015202
    • Isola L M, Gómez B J and Guerra V 2010 Determination of the electron temperature and density in the negative glow of a nitrogen pulsed discharge using optical emission spectroscopy J. Phys. D: Appl. Phys. 43 015202
    • (2010) J. Phys. D: Appl. Phys. , vol.43 , Issue.1
    • Isola, L.M.1    Gómez, B.J.2    Guerra, V.3
  • 35
    • 77958089123 scopus 로고
    • Improved fits for the vibrational and rotational constants of many state of nitrogen and oxigen
    • 10.1063/1.555892
    • Laher R R and Gilmore F R 1991 Improved fits for the vibrational and rotational constants of many state of nitrogen and oxigen J. Phys. Chem. Ref. Data 20 685-712
    • (1991) J. Phys. Chem. Ref. Data , vol.20 , pp. 685-712
    • Laher, R.R.1    Gilmore, F.R.2
  • 37
    • 28844464424 scopus 로고    scopus 로고
    • Determination of the neutral gas temperature of nitrogen-containing low-pressure plasmas using a two-temperature model
    • DOI 10.1016/j.surfcoat.2005.08.035, PII S0257897205008510, ICMCTF 2005
    • Linss V, Kupfer H, Peter S and Richter F 2005 Determination of the neutral gas temperature of nitrogen-containing low-pressure plasmas using a two-temperature model Surf. Coat. Technol. 200 1696-701 (Pubitemid 41762191)
    • (2005) Surface and Coatings Technology , vol.200 , Issue.5-6 , pp. 1696-1701
    • Linss, V.1    Kupfer, H.2    Peter, S.3    Richter, F.4
  • 39
    • 65549150456 scopus 로고    scopus 로고
    • Electron kinetics in glows - From langmuir to the present
    • 10.1088/0963-0252/18/1/014020 0963-0252 014020
    • Tsendin L D 2009 Electron kinetics in glows - from langmuir to the present Plasma Sources Sci. Technol. 18 014020
    • (2009) Plasma Sources Sci. Technol. , vol.18 , Issue.1
    • Tsendin, L.D.1
  • 40
    • 0032679892 scopus 로고    scopus 로고
    • Comprehensive modelling network for dc glow discharge in argon
    • 10.1088/0963-0252/8/2/003 0963-0252 003
    • Bogaerts A 1999 Comprehensive modelling network for dc glow discharge in argon Plasma Sources Sci. Technol. 8 210-29
    • (1999) Plasma Sources Sci. Technol. , vol.8 , Issue.2 , pp. 210-229
    • Bogaerts, A.1


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