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Materials Research Society Symposium - Proceedings

Volumn 672, Issue , 2001, Pages O7.9.1-O7.9.6

Crystallographic texture characterization of inlaid copper interconnects

(4) Zienert, Inka a Besser, Paul b Blum, Werner a Zschech, Ehrenfried a

a IBM MICROELECTRONICS (United States)

b ADVANCED MICRO DEVICES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85009836933 PISSN: 02729172 EISSN: None Source Type: Journal
DOI: 10.1557/proc-672-o7.9 Document Type: Article

Times cited : (1)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.