Blanket and local crystallographic texture determination in layered Al metallization

Materials Research Society Symposium - Proceedings

Volumn 403, Issue , 1996, Pages 617-626

  Rodbell, K P ^a   Hurd, J L ^a   DeHaven, P W ^a  

^a IBM RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTALLOGRAPHY; ELECTROMIGRATION; GRAIN SIZE AND SHAPE; TEXTURES; THIN FILMS; X RAY DIFFRACTION;

BACKSCATTERED KIKUCHI DIFFRACTION; CRYSTALLOGRAPHIC TEXTURE; GRAIN SIZE DISTRIBUTION; STRESS VOIDING;

ALUMINUM ALLOYS;

EID: 0030385771     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (24)