Ultra-thin crystalline silicon films produced by plasma assisted epitaxial growth on silicon wafers and their transfer to foreign substrates

EPJ Photovoltaics

Volumn 1, Issue , 2010, Pages

  Moreno, M ^a,b   Roca I Cabarrocas, P ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b INSTITUTO NACIONAL DE ASTROFÍSICA   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; EPITAXIAL FILMS; EPITAXIAL GROWTH; HYDROGEN; METALLIC FILMS; POLYIMIDES; SILICON COMPOUNDS; SUBSTRATES;

CRYSTALLINE SI WAFERS; CRYSTALLINE SILICON WAFERS; FLEXIBLE POLYIMIDE; FLEXIBLE SUBSTRATE; FOREIGN SUBSTRATES; HIGH QUALITY EPITAXIAL FILMS; LOW SUBSTRATE TEMPERATURE; STRUCTURAL COMPOSITION;

SILICON WAFERS;

EID: 84991987500     PISSN: None     EISSN: 21050716     Source Type: Journal    
DOI: 10.1051/epjpv/2010001     Document Type: Article

References (24)

1. Y. Tsunomura, Y. Yoshimine, M. Taguchi, T. Baba, T. Kinoshita, H. Kanno, H. Sakata, E. Maruyama, M. Tanaka, Sol. Energy. Mater. & Sol. Cells 93, 670 (2009)
2. M. Reuter, W. Brendle, O. Tobail, J.H. Werner, Sol. Energy. Mater. & Sol. Cells 93, 704 (2009)
3. I. Gordon, S. Vallon, A. Mayolet, G. Beaucarne, J. Poortmans, Sol. Energy. Mater. & Sol. Cells 94, 381 (2010)
4. V. Depauw, I. Gordon, G. Beaucarne, J. Poortmans, R. Mertens, J.-P. Celis, J. Appl. Phys. 106, 1 (2009)
5. M. Bruel, Mat. Res. Innovat. 3, 9 (1999)
6. M. Bruel, Electron. Lett. 31, 1201 (1995)
7. H. Moriceau, F. Fournel, B. Aspar, J. Electron. Mater. 32, 829 (2003)
8. B. Terreault, Phys. Stat. Sol. (a) 204, 2129 (2007)
9. A. Giguere, B. Terreault, J. Appl. Phys. 102, 1 (2007)
10. O. Moutanabbir, A. Guiguere, B. Terreault, Appl. Phys. Lett. 84, 3286 (2004)
11. S. Igarashi, A.N. Itakura, M. Kitajima, Jpn J. Appl. Phys. 46, 7812 (2007)
12. N. Desroisers, B. Terreault, Appl. Phys. Lett. 89, 1 (2006)
13. S. Berger, S. Quoizola, A. Fave, A. Ouldabbes, A. Kamaniski, S. Perichon, N.-E. Chabane-Sari, D. Barbier, A. Laugier, Cryst. Res. Technol. 36, 1005 (2001)
14. J. Kraiem, O. Nichiporuk, P. Papet, A. Fave, A. Kaminski, E. Fourmond, J.-P. Boyeaux, P.-J. Ribeyron, A. Laugier, M. Lemiti, in Proc. of PVSEC-15, Shangai, China, 2005, pp. 746−747
15. M. Moreno, M. Labrune, P. Roca i Cabarrocas, Sol. Energy. Mater. & Sol. Cells 94, 402 (2010)
16. Y. Djeridane, A. Abramov, P. Roca i Cabarrocas, Thin Solid Films 515, 7451 (2007)
17. A. Abramov, Y. Djeridane, R. Vanderhaghen, P. Roca i Cabarrocas, J. Non-Cryst. Solids 352, 964 (2006)
18. E.A. Irene, Thin Solid Films 233, 96 (1993)
19. P. Roca i Cabarrocas, S. Hamma, A. Hadjadj, J. Bertomeu, J. Andreu, Appl. Phys. Lett. 69, 529 (1996)
20. G.E. Jellison Jr., V.I. Merkulov, A.A. Puretzky, D.B. Geohegan, G. Eres, D.H. Lowndes, J.B. Caughman, Thin Solid Films 377-378, 68 (2000)
21. B. Kalache, A.I. Kosarev, R. Vanderhaghen, P. Roca i Cabarrocas, J. Appl. Phys. 93, 1262 (2003)
22. N. Pham, Y. Djeridane, A. Abramov, A. Hadjadj, P. Roca i Cabarrocas, Mat. Sci. Eng. B 159-160, 27 (2009)
23. N. Pham, A. Hadjadj, P. Roca i Cabarrocas, O. Jbara, F. Kail, Thin Solid Films 517, 6225 (2009)
24. M. Labrune, M. Moreno, P. Roca i Cabarrocas, Thin Solid Films 518, 2528 (2010)