Large grain μc-Si:H films deposited at low temperature: Growth process and electronic properties

Journal of Non-Crystalline Solids

Volumn 352, Issue 9-20 SPEC. ISS., 2006, Pages 964-967

  Abramov, A ^a,b   Djeridane, Y ^b   Vanderhaghen, R ^b   Roca i Cabarrocas, P ^b  

^a IOFFE INSTITUTE   (Russian Federation)

^b LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

Chemical vapor deposition; Conductivity; Ellipsometry; Microcrystallinity; Nanoparticles; Raman spectroscopy; Solar cells; Thin film transistors

Indexed keywords

ARGON; CHEMICAL VAPOR DEPOSITION; DEPOSITION; ELLIPSOMETRY; FILM GROWTH; PHYSICAL PROPERTIES; RAMAN SPECTROSCOPY; SILICON; SOLAR CELLS; THERMAL EFFECTS; THIN FILM TRANSISTORS; THIN FILMS;

CONDUCTIVITY; CRYSTALLINITY; CRYSTALLIZED FILMS; GAS MIXTURES; LARGE GRAIN; MICROCRYSTALLINITY; NANOPARTICLES;

SEMICONDUCTING FILMS;

EID: 33745458944     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2005.10.060     Document Type: Article

References (17)

1. Kasouit S., Damon-Lacoste J., Vanderhaghen R., and Roca i Cabarrocas P. J. Non-Cryst. Solids 338-340 (2004) 86
2. Roca i Cabarrocas P., Chévrier J.B., Huc J., Lloret A., Parey J.Y., and Schmitt J.P.M. J. Vac. Sci. Technol., A 9 (1991) 2331
3. Hamma S., and Roca i Cabarrocas P. J. Non-Cryst. Solids 227-230 (1998) 852
4. Aspnes D.E., and Studna A.A. Phys. Rev. B 27 (1983) 985
5. Jellison Jr. G.E., Chisholm M., and Gorbatkin S.M. Appl. Phys. Lett. 62 (1993) 3348
6. Veprek S., Sarott F.A., and Iqbal Z. Phys. Rev. B 36 (1987) 3344
7. Viera G., Huet S., and Boufendi L. J. Appl. Phys. 90 (2001) 4175
8. Kunst M., and Werner A. J. Appl. Phys. 58 (1985) 2236
9. Roca i Cabarrocas P. Phys. Status Solidi (c) 1 5 (2004) 1115
10. Roca i Cabarrocas P., Hamma S., Sharma S.N., Viera G., Bertran E., and Costa J. J. Non-Cryst. Solids 227-230 (1998) 871
11. Fujiwara H., Kondo M., and Matsuda A. J. Non-Cryst. Solids 338-340 (2004) 97
12. Vallat-Sauvain E., Kroll U., Meier J., Wyrsch N., and Shah A. J. Non-Cryst. Solids 266-269 (2000) 125
13. Wang F., Liu H.N., He Y.L., Schweiger A., and Schwartz R. J. Non-Cryst. Solids 137&138 (1991) 511
14. Werner J.H., Dassow R., Rinke T.J., Kohler J.R., and Bergmann R.B. Thin Solid Films 383 (2001) 95
15. Morimoto A., Matsumoto M., Yoshita M., Kudeda M., and Shimizu T. Appl. Phys. Lett. 59 (1991) 2130
16. Nasuno Y., Kondo M., and Matsuda A. Appl. Phys. Lett. 78 (2001) 2330
17. Dutta Gupta N., and Chaudhurli P. J. Non-Cryst. Solids 289 (2001) 168