Separation of silicon wafers by the smart-cut method

Materials Research Innovations

Volumn 3, Issue 1, 1999, Pages 9-13

  Bruel, Michel ^a  

^a CEA LETI   (France)

Author keywords

Hydrogen implantation induced splitting; Monocrystalline layer; Silicon on insulator; Wafer bonding

Indexed keywords

EID: 0033148050     PISSN: 14328917     EISSN: None     Source Type: Journal    
DOI: 10.1007/s100190050119     Document Type: Article

References (18)

1. Colinge JP (ed) Silicon on insulator technology-materials to VLSI, 2nd edn. Kluwer Academic Publishers, Boston
2. Bruel M (1996) Nucl Instr and Meth In Phys Res B 108:313
3. Kaminsky M (1971) IEEE Trans Nucl Sci NS 18:208
4. Chu WK, Kastl RH, Lever RF, Mader S, Masters BJ (1976) Radiation damage of 50-250 keV hydrogen ions in silicon. In: Chernow F, Borders JA, Brice DK (eds) Ion implantation in semiconductors. Plenum Press, New York
5. Evans JH (1977) Journal of Nuclear Materials 68:129
6. Bruel M (1995) Electron Lett 31:1201
7. Di Cioccio L, Letiec Y, Letertre F, Jaussaud C, Bruel M (1996) Electron Lett 32:1144
8. Jalaguier E, Aspar B, Pocas S, Michaud JF, Zussy M. Papon AM, Bruel M (1998) Electron Lett 34:408
9. Weldon MK, Marsico VE, Chabal VJ, Agarwal A. Eaglesham DJ. Sapjeta J, Brown W L, Jacobson DC, Caudano Y, Christman SB, Chaban EE (1997) J Vac Sci Technol B 15:1065
10. Bruel M (1993) Patent FR 2,681,472, (1994) US 5,374,564
11. Auberton-Hervé AJ, Lamure JM, Barge T, Bruel M, Aspar B, Pelloie JL (1995) Semicond Int 11:97
12. Aspar B, Bruel M, Moriceau H, Maleville C, Poumeyrol T, Papon AM, Claverie A, Benassayag G, Auberton-Hervé AJ, Barge T (1997) Microelectronic Engineering 36:233
13. Aspar B, Lagahe C, Moriceau H, Soubie A, Bruel M, Auberton-Hervé AJ, Barge T, Maleville C (1998) MRS Spring Meeting (proceedings to be issued). Symposium: Defects and impurities in semiconductors
14. Maszara WP (1990) In: Schmidt DN (ed) Proc Fourth Int Symp on Silicon on Insulator Technology and Devices, vol. 90-6. The Electrochem Soc Series, Pennington, p 199
15. Hubert KP, Hezberg G (1979) Molecular spectra and molecular structural constants of diatomic molecules. Van Nostrans, New York
16. Pearton SJ, Corbett JW, Borenstein JT (1991) Physica B 170: 85
17. Aspar B, Bruel M, Zussy M, Cartier AM (1996) Electron Lett 32:1985
18. Tong QY, Scholz R, Goesele U, Lee TH, Huang LJ, Chao YL, Tan TY (1998) Appl Phys Lett 72:49