Interpretation of the hydrogen evolution during deposition of microcrystalline silicon by chemical transport

Thin Solid Films

Volumn 517, Issue 23, 2009, Pages 6225-6229

  Pham, N ^a,b   Hadjadj, A ^a   i Cabarrocas, P Roca ^b   Jbara, O ^a   Kail F ^c  

^a UNIVERSITÉ DE REIMS CHAMPAGNE ARDENNE   (France)

^b LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^c UNIVERSITY OF ORAN   (Algeria)

Author keywords

Amorphous silicon; Ellipsometry; Hydrogen diffusion; Hydrogen plasma; Microcrystalline silicon

Indexed keywords

A-SI:H; CHEMICAL TRANSPORT; EX SITU; HYDROGEN DIFFUSION; HYDROGEN EVOLUTION; HYDROGEN PLASMA; HYDROGENATED AMORPHOUS SILICON (A-SI:H); HYDROGENATED MICROCRYSTALLINE SILICON; IN-SITU; OUT-DIFFUSION; PHOSPHORUS-DOPED; PLASMA EXPOSURE;

AMORPHOUS FILMS; ATOMS; BORON; BOUNDARY CONDITIONS; DEPOSITION; DEUTERIUM; DIFFUSION; ELLIPSOMETRY; FILM GROWTH; HYDROGEN; HYDROGENATION; MICROCRYSTALLINE SILICON; PHOSPHORUS; PLASMA DEPOSITION; PLASMAS; SEMICONDUCTING SILICON COMPOUNDS; VOLTAGE DIVIDERS;

AMORPHOUS SILICON;

EID: 68349146630     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.02.072     Document Type: Article

References (25)

1. Layadi N., Roca i Cabarroca P., Drévillon B., and Solomon I. Phys. Rev. B 52 (1995) 5136
2. Matsuda A. Thin Solid Films 337 (1999) 1
3. Katiyar M., and Abelson J.R. Mat. Sci. Eng. A 304-306 (2001) 349
4. Lyka B., Amanatides E., and Mataras D. J. Non-Cryst. Solids 352 (2006) 1049
5. Rath J.K., Klerk L.A., Gordijn A., and Schropp R.E.I. Sol. En. Mat. Sol. Cells 90 (2006) 3385
6. Solomon I., Drévillon B., Shirai H., and Layadi N. J. Non-Cryst. Solids 164 (1993) 989
7. Shirai H., Das D., Hamma J., and Shimizu I. Appl. Phys. Lett. 59 (1991) 1096
8. Kail F., Hadjadj A., and Roca i Cabarrocas P. In: Hoffmann W., Bal J.-L., Ossenbrink H., Palz W., and Helm P. (Eds). Proceedings of 19th European photovoltaic Solar Energy Conference, Paris (June 7-11 2004) 1367 France
9. Kail F., Hadjadj A., and Roca i Cabarrocas P. Thin Solid Films 126-131 (2005) 487
10. Fontcuberta i Morral A., and Roca i Cabarrocas P. J. Non-Cryst. Solids 299-302 (2002) 196
11. Kail F., Fonctcuberta i Morral A., Hadjadj A., Roca i Cabarrocas P., and Beorchia A. Philos. Mag. 21 (2004) 595
12. Fontcuberta i Morral A., and Roca i Cabarrocas P. Phys. Rev. B 69 (2004) 125307
13. Roca i Cabarroca P., Layadi N., Drévillon B., and Solomon I. J. Non-Cryst. Solids 198-200 (1996) 871
14. Hamma S., and Roca i Cabarrocas P. J. Appl. Phys. 81 (1997) 7282
15. Katiyar M., and Abelson J.R. Mat. Sci. Eng. A 304-306 (2001) 349
16. Boyce J.B., and Ready S.E. Phys. Rev. B 38 (1988) 11008
17. Street R.A., Tsa C.C., Kakalios J., and Stutzmann M. Philos. Mag. B 56 (1987) 305
18. Pham N., Roca i Cabarrocas P., Hadjadj A., Beorchia A., Kaïl F., and Chahed L. Philos. Mag. 88 (2008) 297
19. Jellison Jr. G.E., and Modine F.A. Appl. Phys. Lett. 69 (1996) 371
20. Mui K., and Smith F. Phys. Rev. B 38 (1988) 10623
21. Agarwal S., Takano A., van de Sanden M.C.M., Maroudas D., and Aydil E.S. J. Chem. Phys. 117 (2002) 10805
22. Durr M., and Hofer U. Surf. Sci. Reports 61 (2006) 465
23. Johnson N.M., Ponce F.A., Street R.A., and Nemanich R.J. Phys. Rev. B 35 (1987) 4166
24. Biegelsen D.K., Street R.A., Tsai C.C., and Knights J.C. Phys. Rev. B 20 (1979) 4839
25. Beyer W., Wagner H., and Mell H. Solid State Commun. 39 (1981) 375