Atomic Layer Deposited Corrosion Protection: A Path to Stable and Efficient Photoelectrochemical Cells

Journal of Physical Chemistry Letters

Volumn 7, Issue 14, 2016, Pages 2867-2878

  Scheuermann, Andrew G ^a   McIntyre, Paul C ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CELL ENGINEERING; CELLS; CORROSION; CORROSION PROTECTION; CYTOLOGY; DEPOSITION; EFFICIENCY; ELECTROCHEMICAL CELLS; ELECTROCHEMISTRY; ELECTROMAGNETIC WAVE ABSORPTION; FILMS; LIGHT ABSORPTION; PHOTOELECTROCHEMICAL CELLS; SEMICONDUCTING SILICON;

ARTIFICIAL PHOTOSYNTHESIS; ATOMIC LAYER DEPOSITED; CORROSIVE CONDITIONS; DEVICE EFFICIENCY; LAYER-BY-LAYER GROWTH; OPERATIONAL LIFETIME; PROTECTION TECHNOLOGIES; ROBUST STABILITY;

ATOMIC LAYER DEPOSITION;

EID: 84979584118     PISSN: None     EISSN: 19487185     Source Type: Journal    
DOI: 10.1021/acs.jpclett.6b00631     Document Type: Article

References (105)

1. United States Environmental Protection Agency. Sources of Greenhouse Gas Emissions. http://www3.epa.gov/climatechange/ghgemissions/sources.html (accessed January 16, 2016).
2. Das, D.; Veziroglu, T. N. Hydrogen Production by Biological Processes: a Survey of Literature Int. J. Hydrogen Energy 2001, 26, 13-28 10.1016/S0360-3199(00)00058-6
3. Radakovits, R.; Jinkerson, R. E.; Darzins, A.; Posewitz, M. C. Genetic Engineering of Algae for Enhanced Biofuel Production Eukaryotic Cell 2010, 9, 486-501 10.1128/EC.00364-09
4. Gust, D.; Moore, T. A.; Moore, A. L. Solar Fuels via Artificial Photosynthesis Acc. Chem. Res. 2009, 42, 1890-1898 10.1021/ar900209b
5. Roy, S. C.; Varghese, O. K.; Paulose, M.; Grimes, C. A. Toward Solar Fuels: Photocatalytic Conversion of Carbon Dioxide to Hydrocarbons ACS Nano 2010, 4, 1259-1278 10.1021/nn9015423
6. 2 Annu. Rev. Phys. Chem. 2012, 63, 541-569 10.1146/annurev-physchem-032511-143759
7. Fujishima, A.; Honda, K. Electrochemical Photolysis of Water at a Semiconductor Electrode Nature 1972, 238, 37-38 10.1038/238037a0
8. Pourbaix, M. J. N. Atlas of Electrochemical Equilibria in Aqueous Solutions, 1 st ed.; Pergamon Press: Oxford, U.K., 1966.
9. Bard, A. J.; Wrighton, M. S. Thermodynamic Potential for the Anodic Dissolution of n-Type Semiconductors J. Electrochem. Soc. 1977, 124, 1706-1710 10.1149/1.2133140
10. Harris, L. A.; Wilson, R. H. Aging Effects in Single Crystal Reduced Rutile Anodes J. Electrochem. Soc. 1976, 123, 1010-1015 10.1149/1.2132982
11. Harris, L. A.; Cross, D. R.; Gerstner, M. E. Corrosion Suppression on Rutile Anodes by High Energy Redox Reactions J. Electrochem. Soc. 1977, 124, 839-844 10.1149/1.2133423
12. 2O Interfaces Through Methyl Termination of Si (111) Surfaces J. Phys. Chem. B 2006, 110, 22291-22294 10.1021/jp064401y
13. Nakato, Y.; Yano, H.; Nishiura, S.; Ueda, T.; Tsubomura, H. Hydrogen Photoevolution at p-Type Silicon Electrodes Coated with Discontinuous Metal Layers J. Electroanal. Chem. Interfacial Electrochem. 1987, 228, 97-108 10.1016/0022-0728(87)80100-6
14. Dominey, R. N.; Lewis, N. S.; Bruce, J. A.; Bookbinder, D. C.; Wrighton, M. S. Improvement of Photoelectrochemical Hydrogen Generation by Surface Modification of p-Type Silicon Semiconductor Photocathodes J. Am. Chem. Soc. 1982, 104, 467-482 10.1021/ja00366a016
15. Memming, R.; Schwandt, G. Electrochemical Properties of Gallium Phosphide in Aqueous Solutions Electrochim. Acta 1968, 13, 1299-1310 10.1016/0013-4686(68)80058-1
16. Aharon-Shalom, E.; Heller, A. J. Efficient p-InP (Rh-H Alloy) and p-InP (Re-H Alloy) Hydrogen Evolving Photocathodes J. Electrochem. Soc. 1982, 129, 2865-2866 10.1149/1.2123695
17. Kocha, S. S.; Turner, J. A.; Nozik, A. J. Study of the Schottky Barrier and Determination of the Energetic Positions of Band Edges at the n- and p-Tye Gallium Indium Phosphide Electrode | Electrolyte Interface J. Electroanal. Chem. 1994, 367, 27-30 10.1016/0022-0728(93)03020-P
18. Khaselev, O.; Turner, J. A. A Monolithic Photovoltaic-Photoelectrochemical Device for Hydrogen Production via Water Splitting Science 1998, 280, 425-427 10.1126/science.280.5362.425
19. 2 in Aqueous Electrolytes Toward Photoelectrochemical Water Splitting J. Electrochem. Soc. 1998, 145, 3335-3339 10.1149/1.1838808
20. Levy-Clement, C.; Heller, A.; Bonner, W. A.; Parkinson, B. A. Spontaneous Photoelectrolysis of HBr and HI J. Electrochem. Soc. 1982, 129, 1701-1705 10.1149/1.2124253
21. Fornarini, L.; Nozik, A. J.; Parkinson, B. A. The Energetics of p/n Photoelectrolysis Cells J. Phys. Chem. 1984, 88, 3238-3243 10.1021/j150659a021
22. 2) in Aqueous Solution J. Am. Chem. Soc. 1980, 102, 5142-5148 10.1021/ja00536a002
23. Bicelli, L. P.; Razzini, G. Surface Defects on n-MoSe 2 Electrodes Used in Photoelectrochemical Solar Cells Surf. Technol. 1983, 20, 383-392 10.1016/0376-4583(83)90116-4
24. Baglio, J. A.; Calabrese, G. S.; Harrison, D. J.; Kamieniecki, E.; Ricco, A. J.; Wrighton, M. S.; Zoski, G. D. Electrochemical Characterization of p-Type Semidoncuting Tungsten Disulfide Photocathodes: Efficient Photoreduction Processes at Semiconductor/Liquid Electrolyte Interfaces J. Am. Chem. Soc. 1983, 105, 2246-2256 10.1021/ja00346a024
25. Marsen, B.; Cole, B.; Miller, E. L. Photoelectrolysis of Water using Thin Copper Gallium Diselenide Electrodes Sol. Energy Mater. Sol. Cells 2008, 92, 1054-1058 10.1016/j.solmat.2008.03.009
26. Kudo, A.; Miseki, Y. Heterogenous Photocatalyst Materials for Water Splitting Chem. Soc. Rev. 2009, 38, 253-278 10.1039/B800489G
27. Walter, M. G.; Warren, E. L.; McKone, J. R.; Boettcher, S. W.; Mi, Q.; Santori, E. A.; Lewis, N. S. Solar Water Splitting Cells Chem. Rev. 2010, 110, 6446-6473 10.1021/cr1002326
28. 2 J. Phys. Chem. C 2010, 114, 783-792 10.1021/jp908088x
29. 2 for Solar Energy Applications Sol. Energy 1986, 36, 163-168 10.1016/0038-092X(86)90122-2
30. 2 Nanomaterials J. Am. Chem. Soc. 2008, 130, 5018-5019 10.1021/ja711023z
31. Kudo, A.; Kato, H.; Tsuji, I. Strategies for the Development of Visible-Light-Driven Photocatalysis for Water Splitting Chem. Lett. 2004, 33, 1534-159 10.1246/cl.2004.1534
32. Kudo, A.; Niishiro, R.; Iwase, A.; Kato, H. Effects of Doping of Metal Cations on Morphology, Activity, and Visible Light Response of Photocatalysts Chem. Phys. 2007, 339, 104-110 10.1016/j.chemphys.2007.07.024
33. 3 as a Novel Photocatalyst for Visible Light-Induced Water Splitting Catal. Lett. 2002, 80, 53-57 10.1023/A:1015322625989
34. 3 Treatment for Increased Visible Light Photoresponse Nanotechnology 2010, 21, 105704 10.1088/0957-4484/21/10/105704
35. Woodward, P. M.; Mizoguch, H.; Kim, Y.-I.; Stoltzfus, M. W. Metal Oxides: Chemistry and Applications 2006, 108, 133 10.1201/9781420028126.ch6
36. Kudo, A.; Miseki, Y. Heterogenous Photocatalyst Materials for Water Splitting Chem. Soc. Rev. 2009, 38, 253-278 10.1039/B800489G
37. Sivula, K.; Le Formal, F.; Grätzel, M. Solar Water Splitting: Progress using Hematite (α-Fe2O3) Photoelectrodes ChemSusChem 2011, 4, 432-449 10.1002/cssc.201000416
38. Godfrey, R. B.; Green, M. A. 655 mV Open-Circuit Voltage, 17.6% Efficient Silicon MIS Solar Cells Appl. Phys. Lett. 1979, 34, 790-793 10.1063/1.90646
39. Green, M. A.; Godfrey, R. B. MIS Solar Cell-General Theory and New Experimental Results for Silicon Appl. Phys. Lett. 1976, 29, 610-612 10.1063/1.89161
40. Singh, R.; Green, M. A.; Rajkanan, K. Review of Conductor-Insulator-Semiconductor (CIS) Solar Cells Sol. Cells 1981, 3, 95-148 10.1016/0379-6787(81)90088-0
41. Green, M. A.; Blakers, A. W. Advantages of Metal-Insulator-Semiconductor Structures for Silicon Solar Cells Sol. Cells 1983, 8, 3-16 10.1016/0379-6787(83)90036-4
42. Grauvogl, M.; Hezel, R. The Truncated-Pyramid MIS Inversion-Layer Solar Cell: a Comprehensive Analysis Prog. Photovoltaics 1998, 6, 15-24 10.1002/(SICI)1099-159X(199801/02)6:1<15::AID-PIP199>3.3.CO;2-H
43. Skotheim, T.; Lundstrom, I.; Prejza, J. Stabiliation of n-Si Photoanodes to Surface Corrosion in Aqueous Electrolyte with a Thin Film of Polypyrrole J. Electrochem. Soc. 1981, 128, 1625-1626 10.1149/1.2127696
44. Nozik, A. J. Heterojunction Electrodes for Photoelectrolysis. Proc. Int. Conf. Photovoltaic Convers. Storage Sol. Energy, 2nd; Springer: New York, 1978.
45. Noufi, R.; Tench, O.; Warren, L. F. Protection of n-GaAs Photoanodes with Photoelectrochemically Generated Polypyrrole Films J. Electrochem. Soc. 1980, 127, 2310 10.1149/1.2129399
46. Bolts, J. M.; Bocarsly, A. B.; Palazzotto, M. C.; Walton, E. G.; Lewis, N. S.; Wrighton, M. S. Chemically Derivatized n-Type Silicon Photoelectrodes. Stabilization to Surface Corrosion in Aqueous Electrolyte Solutions and Mediation of Oxidation Reactions by Surface-Attached Electroactive Ferrocene Reagents J. Am. Chem. Soc. 1979, 101, 1378-1385 10.1021/ja00500a004
47. Gibbons, J. F.; Cogan, G. W.; Gronet, C. M.; Lewis, N. S. A 14% Efficient Nonaqueous Semiconductor/Liquid Junction Solar Cell Appl. Phys. Lett. 1984, 45, 1095-1097 10.1063/1.95028
48. Howe, A. T.; Hawkins, R. T.; Fleisch, T. H. Photoelectrochemical Cells of the Electrolyte-Metal-Insulator-Semiconductor (EMIS) Configuration I. Metal Thickness and Coverage Effects in the Pt/Silicon Oxide/n-Si System J. Electrochem. Soc. 1986, 133, 1369-1375 10.1149/1.2108889
49. Howe, A. T.; Fleisch, T. H. Photoelectrochemical Cells of the Electrolyte-Metal-Insulator-Semiconductor (EMIS) Configuration II. Use of Non-native Oxides in Pt/oxide/n-Si Systems J. Electrochem. Soc. 1987, 134, 72-76 10.1149/1.2100439
50. Howe, A. T.; Hawkins, R. T.; Fleisch, T. H. Photoelectrochemical Cells of the Electrolyte-Metal-Insulator-Semiconductor (EMIS) Configuration III. Aspects Relating to Thermal Oxide Growth in the Pt/Silicon Oxide/n-Si System J. Electrochem. Soc. 1987, 134, 881-886 10.1149/1.2100590
51. Howe, A. T. Multilayer Photoelectrodes and Photovoltaic Cells. U.S. Patent 4,492,743, January 8, 1985.
52. 2 Films J. Electrochem. Soc. 1977, 124, 225-229
53. Rajeshwar, K.; Kaneko, M.; Yamada, A.; Noufi, R. N. Photoelectrochemical Oxidation of Halide-Ions at Naked, Catalytically Modified, and Polymer-Coated N-CdS Electrodes in Aqueous-Media J. Phys. Chem. 1985, 89, 806-811 10.1021/j100251a018
54. 2 Int. J. Hydrogen Energy 1991, 16, 741-743 10.1016/0360-3199(91)90071-P
55. 2 Heterojunction Thin Film Cathode for Photoelectrocatalysis Sol. Energy Mater. Sol. Cells 2003, 77, 229-237 10.1016/S0927-0248(02)00343-4
56. Fan, F. R. F.; Keil, R. G.; Bard, A. J. Semiconductor Electrodes. 48. Photooxidation of Halides and Water on n-Silicon Protected with Silicide Layers J. Am. Chem. Soc. 1983, 105, 220-224 10.1021/ja00340a013
57. Hodes, G.; Thompson, L.; Dubow, J.; Rajeshwar, K. Heterojunction Silicon/Indium Tin Oxide Photoelectrodes: Development of Stable Systems in Aqueous Electrolytes and their Applicability to Solar Energy Conversion and Storage J. Am. Chem. Soc. 1983, 105, 324-330 10.1021/ja00341a004
58. Osaka, T.; Ejiri, K.; Hirota, N. Photoelectrochemical Behavior of Iron Oxide/n-Si Heterojunction Electrodes with an Outer Pd Layer J. Electrochem. Soc. 1984, 131, 1571-1574 10.1149/1.2115911
59. Contractor, A. Q.; Bockris, J. O'M. Investigation of a Protective Conducting Silica Film on n-Silicon Electrochim. Acta 1984, 29, 1427-1434 10.1016/0013-4686(84)87022-X
60. Kainthla, R. C.; Zelenay, B.; Bockris, J. O'M. Protection of n-Si Photoanode against Photocorrosion in Photoelectrochemical Cell for Water Electrolysis J. Electrochem. Soc. 1986, 133, 248-253 10.1149/1.2108556
61. Campet, G.; Manaud, J. P.; Puprichitkun, C.; Sun, Z. W. Protection of Photoanodes against Photo-Corrosion by Surface Deposition of Oxide Films: Criteria for Choosing the Protective Coating J. Electroanal. Chem. Interfacial Electrochem. 1989, 269, 434-445 10.1016/0022-0728(89)85150-2
62. Kraft, A.; Görig, B.; Heckner, K.-H. ITO Coated n-GaAs Electrodes for Photoelectrochemical Cells Sol. Energy Mater. Sol. Cells 1994, 32, 151-158 10.1016/0927-0248(94)90300-X
63. 3-Based Films: Charge Transfer Mechanisms and Stability Mater. Sci. Eng., B 1990, 5, 455-464 10.1016/0921-5107(90)90136-Y
64. Campet, G.; Sun, Z. W.; Keou, P. Realization of Solar Cells Based on Silicon/Oxide Junctions Act. Passive Electron. Compon. 1990, 14, 47-52 10.1155/1990/31452
65. Switzer, A. The n-Silicon/Thallium(III) Oxide Heterojunction Photoelectrochemical Solar Cell J. Electrochem. Soc. 1986, 133, 722-728 10.1149/1.2108662
66. Chen, Y. W.; Prange, J. D.; Duehnen, S.; Park, Y.; Gunji, M.; Chidsey, C. E. D.; McIntyre, P. C. Atomic Layer-Deposited Tunnel Oxide Stabilizes Silicon Photoanodes for Water Oxidation Nat. Mater. 2011, 10, 539-544 10.1038/nmat3047
67. Ritala, M.; Leskela, M. Atomic Layer Epitaxy a Valuable Tool for Nanotechnology? Nanotechnology 1999, 10, 19-24 10.1088/0957-4484/10/1/005
68. Aleskovskii, V. B.; Kol'tsov, S. I. Some Characteristics of Molecular Layering Reactions. Abs. Sci. Tech. Conf.; 1965; p 67, in Russian.
69. Suntola, T.; Antson, J. International patent, FIN 52359, U.S. Patent4,058,430, priority Nov 29, 1974, publication Nov 15, 1977.
70. Puurunen, R. L. A short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy Chem. Vap. Deposition 2014, 20, 332-344 10.1002/cvde.201402012
71. Van Bui, H.; Kovalgin, A. Y.; Wolters, R. A. M. Growth of Sub-Nanometer Thin Continuous TiN Films by Atomic Layer Deposition ECS J. Solid State Sci. Technol. 2012, 1, P285-P290 10.1149/2.020206jss
72. George, S. M. Atomic Layer Deposition: An Overview Chem. Rev. 2010, 110, 111-131 10.1021/cr900056b
73. 3 Charge-Recombination Barrier Formed by Low-Temperature Atomic Layer Deposition J. Mater. Chem. 2009, 19, 2999-3003 10.1039/b819337a
74. Scheuermann, A. G.; Kemp, K. W.; Tang, K.; Lu, D. Q.; Satterthwaite, P. F.; Ito, T.; Chidsey, C. E. D.; McIntyre, P. C. Conductance and Capacitance of Bilayer Protective Oxides for Silicon Water Splitting Anodes Energy Environ. Sci. 2016, 9, 504-516 10.1039/C5EE02484F
75. 2 Oxide Thickness on the Water Oxidation Performance of Metal-Insulator-Silicon Anodes Energy Environ. Sci. 2013, 6, 2487-2496 10.1039/c3ee41178h
76. Henderson, M. A.; Epling, W. S.; Peden, C. H. F.; Perkins, C. L. Insights into Photoexcited Electron Scavenging Processes on TiO2 Obtained from Studies of the Reaction of O2 with OH Groups Adsorbed at Electronic Defects on TiO2 (110) J. Phys. Chem. B 2003, 107, 534-545 10.1021/jp0262113
77. Kurtz, R. L.; Stockbauer, R.; Msdey, T. E.; Roman, E.; De Segovia, J. L. Synchrotron Radiation Studies of H2O Adsorption on TiO2 (11) Surf. Sci. 1989, 218, 178-200 10.1016/0039-6028(89)90626-2
78. Batzill, M.; Katsiev, K.; Gaspar, D. J.; Diebold, U. Variations of the Local Electronic Surface Properties of TiO2 (110) Induced by Intrinsic and Extrinsic Defects Phys. Rev. B: Condens. Matter Mater. Phys. 2002, 66, 235401 10.1103/PhysRevB.66.235401
79. Papageorgiou, A. C.; Beglitis, N. S.; Pang, C. L.; Teobaldi, G.; Cabailh, G.; Chen, Q.; Fisher, A. J.; Hofer, W. A.; Thornton, G. Electron Traps and their Effect on the Surface Chemistry of TiO2 (110) Proc. Natl. Acad. Sci. U. S. A. 2010, 107, 2391-2396 10.1073/pnas.0911349107
80. 2 Coatings Stabilize Si, GaAs, and GaP Photoanodes for Efficient Water Oxidation Science 2014, 344, 1005-1009 10.1126/science.1251428
81. 2/Ni Photoanodes for Water Oxidation ACS Appl. Mater. Interfaces 2015, 7, 15189-15199 10.1021/acsami.5b00379
82. 2: A Generic and Effective Electron-Conducting Protection Layer for Photoanodes and-Cathodes J. Phys. Chem. C 2015, 119, 15019-15027 10.1021/acs.jpcc.5b04407
83. Scheuermann, A. G.; Lawrence, J. P.; Meng, A. C.; Tang, K.; Hendricks, O. L.; Chidsey, C. E. D.; McIntyre, P. C. Titanium Oxide Crystallization and Interface Defect Passivation for High Performance Insulator-Protected Schottky Junction MIS Photoanodes ACS Appl. Mater. Interfaces 2016, 8, 14596 10.1021/acsami.6b03688
84. Scheuermann, A. G.; Chidsey, C. E. D.; McIntyre, P. C. Understanding Photovoltage in Insulator-Protected Water-Oxidation Half-Cells J. Electrochem. Soc. 2016, 163, H192-H200 10.1149/2.0601603jes
85. Scheuermann, A. G.; Lawrence, J. P.; Kemp, K. W.; Ito, T.; Walsh, A.; Chidsey, C. E. D.; Hurley, P. K.; McIntyre, P. C. Design Principles for Maximizing Photovoltage in Metal-Oxide-Protected Water-Splitting Photoanodes Nat. Mater. 2015, 15, 99-105 10.1038/nmat4451
86. Satterthwaite, P. F.; Scheuermann, A. G.; Hurley, P. K.; Chidsey, C. E. D.; McIntyre, P. C. Engineering Interfacial Silicon Dioxide for Improved Metal-Insulator-Semiconductor Silicon Photoanode Water Splitting Performance ACS Appl. Mater. Interfaces 2016, 8, 13140-13149 10.1021/acsami.6b03029
87. Lin, F.; Boettcher, S. W. Adaptive Semiconductor/Electrocatalyst Junctions in Water-Splitting Photoanodes Nat. Mater. 2013, 13, 81-86 10.1038/nmat3811
88. 2-evolving Si Photocathodes ACS Appl. Mater. Interfaces 2014, 6, 22830-22837 10.1021/am506999p
89. Mei, B.; Permyakova, A. A.; Frydendal, R.; Bae, D.; Pedersen, T.; Malacrida, P.; Hansen, O.; Stephens, I. E. L.; Vesborg, P. C. K.; Seger, B.; Chorkendorff, I. Iron-Treated NiO as a Highly Transparent p-Type Protection Layer for Efficient Si-Based Photoanodes J. Phys. Chem. Lett. 2014, 5, 3456-3461 10.1021/jz501872k
90. Shaner, M. R.; Hu, S.; Sun, K.; Lewis, N. S. Stabilization of Si Microwire Arrays for Solar-Driven H2O Oxidation to O2(g) in 1.0M KOH (aq) using Conformal Coatings of Amorphous TiO2 Energy Environ. Sci. 2015, 8, 203-207 10.1039/C4EE03012E
91. 2 Films formed by Atomic-Layer Deposition Energy Environ. Sci. 2014, 7, 3334-3337 10.1039/C4EE01914H
92. 2/Ni Coatings J. Phys. Chem. C 2014, 118, 19618-19624 10.1021/jp506133y
93. Strandwitz, N. C.; Comstock, D. J.; Grimm, R. L.; Nichols-Nielander, A. C.; Elam, J.; Lewis, N. S. Photoelectrochemical Behavior of n-Type Si (100) Electrodes Coated with Thin Films of Manganese Oxide Grown by Atomic Layer Deposition J. Phys. Chem. C 2013, 117, 4931-4936 10.1021/jp311207x
94. Li, C.; Wang, T.; Luo, Z.; Zhang, D.; Gong, J. Transparent ALD-Grown Ta2O5 Protective Layer for Highly Stable ZnO Photoelectrode in Solar Water Splitting Chem. Commun. 2015, 51, 7290-7293 10.1039/C5CC01015B
95. Chen, D.; Zhang, H.; Liu, Y.; Li, J. Graphene and its Derivatives for the Development of Solar Cells, Photoelectrochemical, and Photocatalytic Applications Energy Environ. Sci. 2013, 6, 1362-1387 10.1039/c3ee23586f
96. Hu, J.; Ji, Y.; Shi, Y.; Hui, F.; Duan, H.; Lanza, M. A. Review on the use of Graphene as a Protective Coating against Corrosion Ann. J. Materials Sci. Eng. 2014, 1, 16
97. Zhang, Z.; Dua, R.; Zhang, L.; Zhu, H.; Zhang, H.; Wang, P. Carbon-Layer-Protected Cuprous Oxide Nanowries Arrays for Efficient Water Reduction ACS Nano 2013, 7, 1709-1717 10.1021/nn3057092
98. Britto, R. J.; Benck, J. D.; Young, J. L.; Hahn, C.; Deutsch, T. G.; Jaramillo, T. F. Molybdenum Disulfide as a Protection Layer and Catalyst for Gallium Indium Phosphide Solar Water Splitting Photocathodes J. Phys. Chem. Lett. 2016, 7, 2044-2049 10.1021/acs.jpclett.6b00563
99. 2 ACS Nano 2015, 9, 11302-11309 10.1021/acsnano.5b04979
100. 2 J. Mater. Chem. A 2013, 1, 8935-8941 10.1039/c3ta11633f
101. 2 Thin Films by Atomic Layer Deposition Nanoscale 2016, 8, 10792-10798 10.1039/C6NR01346E
102. Kenney, M. J.; Gong, M.; Li, Y.; Wu, J. Z.; Feng, J.; Lanza, M.; Dai, H. High-Performance Silicon Photoanodes Passivated with Ultrathin Nickel Films for Water Oxidation Science 2013, 342, 836-840 10.1126/science.1241327
103. x Thin Films J. Phys. Chem. Lett. 2014, 5, 1948-1952 10.1021/jz500865g
104. Hu, S.; Lewis, N. S.; Ager, J. W.; Yang, J.; McKone, J. R.; Strandwitz, N. C. Thin Film Materials for the Protection of Semiconducting Photoelectrodes in Solar-Fuel Generators J. Phys. Chem. C 2015, 119, 24201-24228 10.1021/acs.jpcc.5b05976
105. Dai, P.; Xie, J.; Mayer, M. T.; Yang, X.; Zhan, J.; Wang, D. Solar Hydrogen Generation by Silicon Nanowires Modified with Platinum Nanoparticle Catalysts by Atomic Layer Deposition Angew. Chem. 2013, 125, 11325-11329 10.1002/ange.201303813