A short history of atomic layer deposition: Tuomo Suntola's atomic layer epitaxy

Chemical Vapor Deposition

Volumn 20, Issue 10-12, 2014, Pages 332-344

  Puurunen, Riikka L ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

ALD; ALE; EL displays; History; ZnS

Indexed keywords

ATOMS; FILM GROWTH; HISTORY; II-VI SEMICONDUCTORS; SEMICONDUCTOR DEVICES; THIN FILMS; WIDE BAND GAP SEMICONDUCTORS; ZINC; ZINC SULFIDE;

APPLICATION AREA; DISPLAY PANELS; ELECTRO-LUMINESCENT; MATERIAL SELECTION; POLYCRYSTALLINE; SATURATING GAS; THIN FILM GROWTH TECHNIQUES; ZNS THIN FILMS;

ATOMIC LAYER DEPOSITION;

EID: 84922764057     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.201402012     Document Type: Review

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