Manufacturing intelligence for reducing false alarm of defect classification by integrating similarity matching approach in CMOS image sensor manufacturing

Computers and Industrial Engineering

Volumn 99, Issue , 2016, Pages 465-473

  Chen, Ying Jen ^a   Fan, Chu Yuan ^a   Chang, Kuo Hao ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Automatic optical inspection; Data mining and big data analytics; Defect detection and classification; Manufacturing intelligence; Similarity matching; Yield enhancement

Indexed keywords

BIG DATA; CLASSIFICATION (OF INFORMATION); CMOS INTEGRATED CIRCUITS; DATA MINING; DECISION MAKING; DEFECTS; DIGITAL CAMERAS; ERRORS; FEATURE EXTRACTION; IMAGE RESOLUTION; IMAGE SENSORS; INSPECTION; MANUFACTURE; OPTICAL TESTING;

AUTOMATIC OPTICAL INSPECTION; DATA ANALYTICS; DEFECT DETECTION; SIMILARITY-MATCHING; YIELD ENHANCEMENT;

ALARM SYSTEMS;

EID: 84971617678     PISSN: 03608352     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cie.2016.05.009     Document Type: Article

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