Feature extraction for defect classification and yield enhancement in color filter and micro-lens manufacturing: An empirical study

Journal of Industrial and Production Engineering

Volumn 30, Issue 8, 2013, Pages 510-517

  Chen, Ying Jen ^a   Lin, Tzu Hsiang ^a   Chang, Kuo Hao ^a   Chien, Chen Fu ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Classification and regression tree; Color filter and micro lens processes; Feature extraction; Surface defect detection; Yield enhancement

Indexed keywords

AUTOMATIC DEFECT DETECTIONS; CLASSIFICATION AND REGRESSION TREE; CLASSIFICATION RESULTS; COMPLEMENTARY METAL OXIDE SEMICONDUCTOR IMAGE SENSOR; DEFECT CLASSIFICATION; MICRO-LENS; SURFACE DEFECT DETECTIONS; YIELD ENHANCEMENT;

DEFECTS; EDGE DETECTION; FEATURE EXTRACTION; FORESTRY; MANUFACTURE; MICROLENSES; SUPPLY CHAINS;

COLOR;

CLASSIFICATION; COLOR; DEFECT DETECTORS; FILTERS; REGRESSION ANALYSIS; SUPPLY CHAIN MANAGEMENT;

EID: 84897780100     PISSN: 21681015     EISSN: 21681023     Source Type: Journal    
DOI: 10.1080/21681015.2013.869512     Document Type: Article

References (22)

1. Breiman, L., J. H. Freidman, R. A. Olshen and C. J. Stone, Classification and Regression Trees, Wadsworth & Brooks/Cole Advanced Books & Softward, Pacific Grove, CA (1984).
2. Canny, J., "A computational approach to edge detection," IEEE Transactions on Pattern Analysis and Machine Intelligence, 8, 679-698 (1986).
3. Chauhan, S. S. and J. M. Proth, "Analysis of a supply chain partnership with revenue sharing," International Journal of Production Economics, 97, 44-51 (2005).
4. Chien, C.-F., Y.-J. Chen, C.-Y. Hsu and H.-K. Wang, "Overlay error compensation using advanced process control with dynamically adjusted proportional-integral R2R controller," IEEE Transactions on Automation Science and Engineering, in press.
5. Chien, C.-F., S.-C. Hsu and Y.-J. Chen, "A System for online detection and classification of wafer bin map defect patterns for manufacturing intelligence," International Journal of Production Research, 51, 2324-2338 (2013).
6. Chou, P. B., A. R. Rao, M. C. Sturzenbecker, F. Y. Wu and V. H. Brecher, "Automatic defect classification for semiconductor manufacturing," Machine Vision and Applications, 9, 201-214 (1997).
7. Hani, A. F. M., A. S. Malik, R. Kamil and C.-M. Thong, "A Review of SMD-PCB Defects and Detection Algorithms," Proceedings of SPIE, 8350, 1-7 (2012).
8. Hsu, S.-C. and C.-F. Chien, "Hybrid data mining approach for pattern extraction from wafer bin map to improve yield in semiconductor manufacturing," International Journal of Production Economics, 107, 88-103 (2007).
9. Jiang, B. C., C. C. Wang and P. L. Chen, "Logistic regression tree applied to classify PCB golden finger defects," The International Journal of Advanced Manufacturing Technology, 24, 496-502 (2004).
10. Jiang, B. C., C.-C. Wang and H.-C. Liu, "Liquid crystal display surface uniformity defect inspection using analysis of variance and exponentially weighted moving average techniques," International Journal of Production Research, 43, 67-80 (2005).
11. Kuo, C.-J., C.-F. Chien and C.-D. Chen, "Manufacturing intelligence to exploit the value of production and tool data to reduce cycle time," IEEE Transactions on Automation Science and Engineering, 8, 103-111 (2011).
12. Kuo, C.-F., C.-T. M. Hsu, C.-H. Fang, S.-M. Chao and Y.-D. Lin, "Automatic defect inspection system of colour filters using Taguchi-based neural network," International Journal of Production Research, 51, 1464-1476 (2013).
13. Li, W.-C. and D.-M. Tsai, "Defect inspection in low-contrast LCD images using Hough transform-based nonstationary line detection," IEEE Transactions on Industrial Informatics, 7, 136-147 (2011).
14. Li, W.-C. and D.-M. Tsai, "Wavelet-based defect detection in solar wafer images with inhomogeneous texture," Pattern Recognition, 45, 742-756 (2012).
15. Liu, C.-W. and C.-F. Chien, "An intelligent system for wafer bin map defect diagnosis: An empirical study for semiconductor manufacturing," Engineering Applications of Artificial Intelligence, 26, 1479-1486 (2013).
16. Tasi, D.-M., "Automatic visual inspection for surface defects," Keynote speech on 2012 International Symposium on Semiconductor Manufacturing Intelligence (ISMI2012) & 2012 Decision Analysis Symposium (DAS2012), Jan. 6-8, Hsinchu, Taiwan (2012).
17. Tsai, D.-M. and J.-Y. Luo, "Mean shift-based defect detection in multicrystalline solar wafer surfaces," IEEE Transactions on Industrial Informatics, 7, 125-135 (2011)
18. Tsai, D.-M. and H.-Y. Tsai, "Low-contrast surface inspection of mura defects in liquid crystal displays using optical flow-based motion analysis," Machine Vision and Applications, 22, 629-649 (2011).
19. Tsai, D.-M., S.-C. Wu and W.-Y. Chiu, "Defect detection in solar modules using ICA basis images," IEEE Transactions on Industrial Informatics, 9, 122-131 (2013)
20. Tsai, D.-M., S.-C. Wu and W.-C. Li, "Defect detection of solar cells in electroluminescence images using Fourier image reconstruction image reconstruction," Solar Energy Materials & Solar Cells, 99, 250-262 (2012).
21. Tseng, D.-C., I.-L. Chung, P.-L. Tsai and C.-M. Chou, "Defect classification for LCD color filters using neural-network decision tree classifier," International Journal of Innovative Computing Information and Control, 7, 3695-3707 (2011).
22. Xie, X., "A review of recent advances in surface defect detection using texture analysis techniques," Electronic Letters on Computer Vision and Image Analysis, 7, 1-22 (2008).