Petri net modeling and one-wafer scheduling of single-arm tree-like multi-cluster tools

IEEE International Conference on Automation Science and Engineering

Volumn 2015-October, Issue , 2015, Pages 292-297

  Zhu, Qinghua ^a,b   Qiao, Yan ^b   Zhou, Mengchu ^b  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Multi cluster tools; Petri nets; Scheduling

Indexed keywords

ALGORITHMS; AUTOMATION; FORESTRY; PETRI NETS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

CYCLIC SCHEDULES; ITS APPLICATIONS; MULTI-CLUSTER TOOLS; PERIODIC SCHEDULE; PETRI NET MODELS; SCHEDULING PROBLEM; SEMICONDUCTOR MANUFACTURING; SUFFICIENT AND NECESSARY CONDITION;

TOOLS;

EID: 84952761314     PISSN: 21618070     EISSN: 21618089     Source Type: Conference Proceeding    
DOI: 10.1109/CoASE.2015.7294094     Document Type: Conference Paper

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