Optimal one-wafer cyclic scheduling of single-arm multicluster tools with two-space buffering modules

IEEE Transactions on Systems, Man, and Cybernetics: Systems

Volumn 44, Issue 12, 2014, Pages 1584-1597

  Yang, FaJun ^a   Wu, NaiQi ^a,b   Qiao, Yan ^a   Zhou, MengChu ^c,d  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Macao)

^c Department of Computer Science and Technology   (China)

^d NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Multi cluster tools; Petri net (PN); Scheduling; Semiconductor manufacturing

Indexed keywords

PETRI NETS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

CLUSTER TOOL; CYCLIC SCHEDULES; CYCLIC SCHEDULING; DYNAMIC BEHAVIORS; LOWER BOUNDS; MULTI-CLUSTER TOOLS; PETRI NET MODELS; SEMICONDUCTOR MANUFACTURING;

TOOLS;

EID: 84911949394     PISSN: 21682216     EISSN: 21682232     Source Type: Journal    
DOI: 10.1109/TSMC.2014.2327051     Document Type: Article

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