메뉴 건너뛰기




Volumn 51, Issue 16, 2013, Pages 4835-4852

Modelling and scheduling analysis of multi-cluster tools with residency constraints based on time constraint sets

Author keywords

modelling; multi cluster tools; multiple wafer product types; residency constraints; scheduling; time constraint set

Indexed keywords

CONFIGURATION FLEXIBILITY; EFFECTIVE ALGORITHMS; MULTI-CLUSTER TOOLS; PRODUCT TYPES; PRODUCTION CAPACITY; RESIDENCY CONSTRAINTS; SCHEDULING ANALYSIS; TIME CONSTRAINT SETS;

EID: 84882451343     PISSN: 00207543     EISSN: 1366588X     Source Type: Journal    
DOI: 10.1080/00207543.2013.774490     Document Type: Article
Times cited : (18)

References (14)
  • 2
    • 78651094962 scopus 로고    scopus 로고
    • Optimal scheduling of multi-cluster tools with constant robot moving times, part ii: Tree-like topology configurations
    • Chan, W.-K. V., Ding, S., Yi, J., and, Song, D. 2011a. Optimal Scheduling of Multi-Cluster Tools with Constant Robot Moving Times, Part II: Tree-Like Topology Configurations. IEEE Transactions on Automation Science Engineering, 8 (1): 17-28.
    • (2011) IEEE Transactions on Automation Science Engineering , vol.8 , Issue.1 , pp. 17-28
    • Chan, W.-K.V.1    Ding, S.2    Yi, J.3    Song, D.4
  • 3
    • 78651098378 scopus 로고    scopus 로고
    • Optimal scheduling of multi-cluster tools with constant robot moving times, part i: Two-cluster analysis
    • Chan, W.-K., Yi, J., and, Ding, S. 2011b. Optimal Scheduling of Multi-Cluster Tools with Constant Robot Moving Times, Part I: Two-Cluster Analysis. IEEE Transactions on Automation Science Engineering, 8 (1): 5-16.
    • (2011) IEEE Transactions on Automation Science Engineering , vol.8 , Issue.1 , pp. 5-16
    • Chan, W.-K.1    Yi, J.2    Ding, S.3
  • 4
    • 0026154176 scopus 로고
    • Temporal constraint networks
    • Dechter, R., Meiri, I., and, Pearl, J. 1991. Temporal constraint networks. Artif Intel, 49 (1): 61-95.
    • (1991) Artif Intel , vol.49 , Issue.1 , pp. 61-95
    • Dechter, R.1    Meiri, I.2    Pearl, J.3
  • 5
    • 33747443542 scopus 로고    scopus 로고
    • Multi-cluster tools scheduling: An integrated event graph and network model approach
    • Ding, S., Yi, J., and M. T. Zhang. 2006. "Multi-cluster Tools Scheduling: An Integrated Event Graph and Network Model Approach." IEEE Transactions on Semiconductor Manufacturing 19 (3): 339-351.
    • (2006) IEEE Transactions on Semiconductor Manufacturing , vol.19 , Issue.3 , pp. 339-351
    • Ding, S.1    Yi, J.2    Zhang, M.T.3
  • 6
    • 25144432280 scopus 로고    scopus 로고
    • Online scheduling of integrated single-wafer processing tools with temporal constraints
    • Hyun, Joong Yoon, and, Doo, Yong Lee. 2005. Online Scheduling of Integrated Single-Wafer Processing Tools with Temporal Constraints. IEEE Transactions on Semiconductor Manufacturing, 18 (4): 390-398.
    • (2005) IEEE Transactions on Semiconductor Manufacturing , vol.18 , Issue.4 , pp. 390-398
    • Hyun, J.Y.1    Doo, Y.L.2
  • 9
    • 0036691245 scopus 로고    scopus 로고
    • Optimal scheduling techniques for cluster tools with process-module and transport-module residency constraints
    • Rostami, S., and, Hamidzadeh, B. 2002. Optimal Scheduling Techniques for Cluster Tools with Process-Module and Transport-Module Residency Constraints. IEEE Transactions on Semiconductor Manufacturing, 15 (3): 341-349.
    • (2002) IEEE Transactions on Semiconductor Manufacturing , vol.15 , Issue.3 , pp. 341-349
    • Rostami, S.1    Hamidzadeh, B.2
  • 10
    • 1342329492 scopus 로고    scopus 로고
    • An optimal residency-aware scheduling technique for cluster tools with buffer module
    • Rostami, S., and, Hamidzadeh, B. 2004. An Optimal Residency-Aware Scheduling Technique for Cluster Tools with Buffer Module. IEEE Transactions on Semiconductor Manufacturing, 17 (1): 68-73.
    • (2004) IEEE Transactions on Semiconductor Manufacturing , vol.17 , Issue.1 , pp. 68-73
    • Rostami, S.1    Hamidzadeh, B.2
  • 11
    • 0035485501 scopus 로고    scopus 로고
    • An optimal periodic scheduler for dual-arm robots in cluster tools with residency constraints
    • Rostami, S., Hamidzadeh, B., and, Camporese, D. 2001. An Optimal Periodic Scheduler for Dual-Arm Robots in Cluster Tools with Residency Constraints. IEEE Transactions on Robotics and Automation, 17 (5): 609-618.
    • (2001) IEEE Transactions on Robotics and Automation , vol.17 , Issue.5 , pp. 609-618
    • Rostami, S.1    Hamidzadeh, B.2    Camporese, D.3
  • 13
    • 77956689709 scopus 로고    scopus 로고
    • A branch and bound algorithm for optimal cyclic scheduling in a robotic cell with processing time windows
    • Yan, Pengyu, Chu, Chengbin, Yang, Naiding, and, Che, Ada. 2010. A Branch and Bound Algorithm for Optimal Cyclic Scheduling in a Robotic Cell with Processing Time Windows. International Journal of Production Research, 48 (21): 6461-6480.
    • (2010) International Journal of Production Research , vol.48 , Issue.21 , pp. 6461-6480
    • Yan, P.1    Chu, C.2    Yang, N.3    Che, A.4
  • 14
    • 41949134365 scopus 로고    scopus 로고
    • Steady-state throughput and scheduling analysis of multi-cluster tools: A decomposition approach
    • Yi, J., Ding, S., Song, D., and, Zhang, M. T. 2008. Steady-State Throughput and Scheduling Analysis of Multi-Cluster Tools: A Decomposition Approach. IEEE Transactions on Automation Science Engineering, 5 (2): 321-336.
    • (2008) IEEE Transactions on Automation Science Engineering , vol.5 , Issue.2 , pp. 321-336
    • Yi, J.1    Ding, S.2    Song, D.3    Zhang, M.T.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.