Wear resistant multiphase compound of Ti(C, O, N)/a-C:H nano composite film

Thin Solid Films

Volumn 590, Issue , 2015, Pages 17-27

  Kumar, N ^a   Natarajan, Gomathi ^a   Dinesh Kumar, D ^b   Krishna, Nanda Gopala ^a   Ravindran, T R ^a   Dash, S ^a   Tyagi, A K ^a  

^a INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH   (India)

^b ANNA UNIVERSITY   (India)

Author keywords

Mechanical properties; Surface subsurface chemical analysis; TiC nanostructured film

Indexed keywords

AMORPHOUS CARBON; CHEMICAL ANALYSIS; FRICTION; MECHANICAL PROPERTIES; NANOCOMPOSITES; NANOCRYSTALS; NITROGEN; OXYGEN; THIN FILMS; TITANIUM CARBIDE; TITANIUM OXIDES; WEAR OF MATERIALS; WEAR RESISTANCE;

CARBON CONCENTRATIONS; FRICTION COEFFICIENTS; HYDROGENATED AMORPHOUS CARBON (A-C:H); LOW FRICTION COEFFICIENTS; MULTI-PHASE COMPOUNDS; NANOSTRUCTURED FILMS; REACTIVE MAGNETRON SPUTTERING; SUBSTRATE TEMPERATURE;

NANOCOMPOSITE FILMS;

EID: 84941349127     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2015.07.041     Document Type: Article

References (57)

1. I. Tzanakis, M. Hadfield, B. Thomas, S.M. Noya, I. Henshaw, and S. Austen Future perspectives on sustainable tribology Renew. Sust. Energ. Rev. 16 2012 4126 4140
2. N. Tas, T. Sonnenberg, H. Jansen, R. Legtenberg, and M. Elwenspoek Stiction in surface micromachining J. Micromech. Microeng. 6 1996 385 397
3. B. Bhushan Tribology issues and opportunities in MEMS Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS, Columbus, Ohio, USA. 9-11 November 1997 978-94-010-6121-6
4. R. Hauert, and J. Pastcheider From alloying to nanocomposites-improved performance of hard coatings Adv. Eng. Mater. 2 2000 247 259
5. A.A. Voevodin, S.V. Prasad, and J.S. Zabinski Nanocrystalline carbide/amorphous carbon composites J. Appl. Phys. 82 1997 855 862
6. A.A. Voevodin, and J.S. Zabinski Load-adaptive crystalline-amorphous nanocomposites J. Mater. Sci. 33 1998 319 327
7. A.A. Voevodin, T.A. Fitz, J.J. Hu, and J.S. Zabinski Nanocomposite tribological coatings with "chameleon" surface adaptation J. Vac. Sci. Technol. A 20 2002 1434 1444
8. J.C. Sánchez-López, D. Martínez-Martínez, M.D. Abad, and A. Fernández Metal carbide/amorphous C-based nanocomposite coatings for tribological applications Surf. Coat. Technol. 204 2009 947 954
9. N. Kumar, P.K. Ajikumar, S. Dash, M. Kamruddin, A.K. Tyagi, and Baldev Raj Ultra-low friction of TiC/a-C composite coatings Tribol. Int. 44 2011 1251 1256
10. N. Kumar, N. Gomathi, R. Dumpala, R. Pandian, B. Ashok, S.K. Srivastava, T.R. Ravindran, S. Rajagopalan, S. Dash, A.K. Tyagi, and M.S. Ramachandra Rao Microstructure and phase composition dependent tribological properties of TiC/a-C nanocomposite thin films Surf. Coat. Technol. 258 2014 557 565
11. E. Lewin, O. Wilhelmsson, and U. Jansson Nanocomposite nc-TiC/a-C thin films for electrical contact applications J. Appl. Phys. 100 2006 54303 54312
12. Y.T. Pei, D. Galvan, and J.Th.M. De Hosson Nanostructure and properties of TiC/a-C:H composite coatings Acta Mater. 53 2005 4505 4521
13. A.A. Voevodin, and J.S. Zabinski Supertough wear-resistant coatings with 'chameleon' surface adaptation Thin Solid Films 370 2000 223 231
14. y decorative thin films Thin Solid Films 515 2007 5424 5429
15. P. Lima, M. Araújo, M.T. Mathew, L.A. Rocha, A.M. Pinto, J.M. Chappé, M.D. Ramos, L. Marques, J.F. Pierson, and F. Vaz Tribocorrosion behavior of Ti-C-O-N nanostructured thin films (black) for decorative applications Tribol. Int. 68 2013 1 10
16. D.A. Shirley High-resolution photoemission spectrum of the valence bands of gold Phys. Rev. B 5 1972 4709 4714
17. W.C. Oliver, and G.M. Pharr An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments J. Mater. Res. 7 1992 1564 1583
18. A.Z. Ait Djafer, N. Saoula, N. Madaoui, and A. Zerizer Deposition and characterization of titanium carbide thin films by magnetron sputtering using Ti and TiC targets Appl. Surf. Sci. 312 2014 57 62
19. 2 films prepared by reactive DC magnetron sputtering Appl. Surf. Sci. 256 2009 1595 1603
20. x produced by self-propagating high-temperature synthesis Scripta Mater. 46 2002 121 126
21. U. Jansson, and E. Lewin Sputter deposition of transition-metal carbide films - a critical review from a chemical perspective Thin Solid Films 536 2013 1 24
22. N. Pessall, R.E. Gold, and H.A. Johansen A study of superconductivity in interstitial compounds J. Phys. Chem. Solids 29 1968 19 38
23. I. Dreiling, A. Haug, H. Holzschuh, and T. Chassé Raman spectroscopy as a tool to study cubic Ti-C-N CVD coatings Surf. Coat. Technol. 204 2009 1008 1012
24. 2 nanoparticles Vib. Spectrosc. 37 2005 33 38
25. A.C. Fernandes, L. Cunha, C. Moura, F. Vaz, P. Carvalho, E. Le Bourhis, Ph. Goudeau, J.P. Rivière, and N.M.G. Parreira The effect of bombarding conditions on the properties of multifunctional Ti-C-O thin films grown by magnetron sputtering Surf. Coat. Technol. 202 2007 946 951
26. A.C. Ferrari, and J. Robertson Interpretation of Raman spectra of disordered and amorphous carbon Phys. Rev. B 20 2000 14095 14107
27. - 1 Raman line in nanocrystalline diamond films Carbon 42 2004 911 917
28. M. Veres, S. Tóth, and M. Koós New aspects of Raman scattering in carbon-based amorphous materials Diamond Relat. Mater. 17 2008 1692 1696
29. A.A. Voevodin, M.A. Capano, S.J.P. Laube, M.S. Donley, and J.S. Zabinski Design of a Ti/TiC/DLC functionally gradient coating based on studies of structural transitions in Ti-C thin films Thin Solid Films 298 1997 107 115
30. Y. Cheng, and Y.F. Zheng Characterization of TiN, TiC and TiCN coatings on Ti-50.6 at.% Ni alloy deposited by PIII and deposition technique Surf. Coat. Technol. 201 2007 4909 4912
31. D. Martínez-Martínez, C. López-Cartes, A. Fernández, and J.C. Sánchez-López Influence of the microstructure on the mechanical and tribological behavior of TiC/a-C nanocomposite coatings Thin Solid Films 517 2009 1662 1671
32. J. Dominik, and P. Jorg A complete and self-consistent evaluation of XPS spectra of TiN J. Electron Spectrosc. Relat. Phenom. 185 2012 523 534
33. A. Kotani, and H. Ogasawara Theory of core-level spectroscopy of rare-earth oxides J. Electron Spectrosc. Relat. Phenom. 60 1992 257 299
34. x Phys. Rev. B 28 1983 3214 3223
35. E. Lewin, M. Gorgoi, F. Schäfers, S. Svensson, and U. Jansson Influence of sputter damage on the XPS analysis of metastable nanocomposite coatings Surf. Coat. Technol. 204 2009 455 462
36. T. Takeno, T. Komiyama, H. Miki, T. Takagi, and T. Aoyama XPS and TEM study of W-DLC/DLC double-layered film Thin Solid Films 517 2009 5010 5013
37. Y. Yamada, H. Yasuda, K. Murota, M. Nakamura, T. Sodesawa, and S. Sato Analysis of heat-treated graphite oxide by X-ray Photoelectron Spectroscopy J. Mater. Sci. 48 2013 8171 8198
38. E. Lewin, M. Råsander, M. Klintenberg, A. Bergman, O. Eriksson, and U. Jansson Design of the lattice parameter of embedded nanoparticles Chem. Phys. Lett. 496 2010 95 99
39. B. Hornetz, H.J. Michel, and J. Halbritter ARXPS-analysis and morphology of sputtered nanocrystalline TiC/SiC coatings J. Anal. Chem. 349 1994 233 235
40. M. Magnuson, E. Lewin, L. Hultman, and U. Jansson Electronic structure and chemical bonding of nanocrystalline-TiC/amorphous-C nanocomposites Phys. Rev. B 80 2009 235108 235114
41. P. Ettmayer, and W. Lengauer Carbides: transition metal solid state chemistry R.B. King, Encyclopedia of Inorganic Chemistry 2 1994 John Wiley & Sons Ltd 526 531
42. J. Häglund, A. Fernández Guillermet, G. Grimvall, and M. Körling Theory of bonding in transition-metal carbides and nitrides Phys. Rev. B 48 1993 11685 11691
43. S. Hüfner Photoelectron Spectroscopy Third edition 2003 Springer-Verlag Berlin
44. 2 rutile (110) single crystal face: XPS vs. periodic DFT Surf. Sci. 601 2007 518 527
45. 2 granular thin films ACS Appl. Mater. Interfaces 2 2010 2629 2636
46. y films by spectroscopic ellipsometry, and XPS Appl. Surf. Sci. 179 2001 181 190
47. y thin films revealed and quantified by XPS factorial analysis Acta Mater. 54 2006 3067 3074
48. 2 decomposition and oxidation of pre-adsorbed volatile organic compounds Carbon 77 2014 89 98
49. 2 (110) surface Surf. Sci. 302 1994 329 340
50. M. Oku, H. Matsuta, K. Wagatsuma, Y. Waseda, and S. Kohiki Removal of inelastic scattering part from Ti2p XPS spectrum of TiO by deconvolution method using O1s as response function J. Electron Spectrosc. Relat. Phenom. 105 1999 211 218
51. D. Jaeger, and J. Patsheider A complete and self-consistent evaluation of XPS spectra of TiN J. Electron Spectrosc. Relat. Phenom. 185 2012 523 534
52. y multilayers on steel for bio implants Vacuum 88 2013 108 113
53. 2 and CO as reactive gases Appl. Surf. Sci. 233 2004 115 122
54. M. Dienwiebel, G.S. Verhoeven, N. Pradeep, J.W.M. Frenken, J.A. Heimberg, and H.W. Zandbergen Superlubricity of graphite Phys. Rev. Lett. 92 2004 126101 126104
55. J. Xiao, L. Zhang, K. Zhou, J. Li, X. Xie, and Z. Li Anisotropic friction behaviour of highly oriented pyrolytic graphite Carbon 65 2013 53 62
56. N. Kumar, R. Radhika, A.T. Kozakov, R. Pandian, S. Chakravarty, T.R. Ravindran, S. Dash, and A.K. Tyagi Friction anisotropy in boronated graphite Appl. Surf. Sci. 324 2015 443 454
57. A. Kovalchenko, O. Ajayi, A. Erdemir, G. Fenske, and I. Etsion The effect of laser texturing of steel surfaces and speed load parameters on the transition of lubrication regime from boundary to hydrodynamic Tribol. Trans. 47 2004 299 307