Characterization of ITO- and TiOxNy films by spectroscopic ellipsometry, spectraphotometry and XPS

Applied Surface Science

Volumn 179, Issue 1-4, 2001, Pages 181-190

  Bartella, J ^a   Schroeder, J ^a   Witting, K ^a  

^a Applied Films GmbH and Co   (Germany)

Author keywords

Optical constants; Spectroscopic ellipsometry; Thin films

Indexed keywords

ELLIPSOMETRY; INDIUM COMPOUNDS; OPTICAL GLASS; SPECTROPHOTOMETRY; SUBSTRATES; SURFACE ROUGHNESS; THIN FILMS; TITANIUM COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRON MICROPROBE (EMP) ANALYSIS;

OPTICAL FILMS;

EID: 0035898725     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00307-5     Document Type: Article

References (12)