A complete and self-consistent evaluation of XPS spectra of TiN

Journal of Electron Spectroscopy and Related Phenomena

Volumn 185, Issue 11, 2012, Pages 523-534

  Jaeger, Dominik ^a   Patscheider, Jörg ^a  

^a Laboratory for Nanoscale Materials Science   (Switzerland)

Author keywords

AR XPS; Satellites; Shake up; Titanium nitride; Tougaard background

Indexed keywords

ANGLE-RESOLVED X-RAY PHOTOELECTRON SPECTROSCOPY; AR-XPS; BACKGROUND CORRECTION; BASIC PRINCIPLES; CORE-LEVEL LINES; ELECTRON CONFIGURATION; ELECTRON EXCITATIONS; ENERGY DIFFERENCES; ENERGY LOSS FEATURE; ENERGY WINDOWS; IONIZED STATE; MINIMAL SURFACES; PHOTOEMISSION LINES; QUANTITATIVE EVALUATION; RESIDUAL OXYGEN; SHAKE-UP; SINGLE-CRYSTALLINE; TOUGAARD BACKGROUND; XPS SPECTRA;

ENERGY DISSIPATION; OXYGEN; PHOTOELECTRONS; QUANTUM THEORY; SATELLITES; X RAY PHOTOELECTRON SPECTROSCOPY;

TITANIUM NITRIDE;

EID: 84871834976     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elspec.2012.10.011     Document Type: Article

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