The influence of structure changes in the properties of TiCxOy decorative thin films

Thin Solid Films

Volumn 515, Issue 13, 2007, Pages 5424-5429

  Fernandes, A C ^a   Vaz, F ^a   Cunha, L ^a   Parreira, N M G ^b   Cavaleiro, A ^b   Goudeau, Ph ^c   Le Bourhis, E ^c   Riviere J P ^c   Munteanu, D ^d   Borcea, B ^d   Cozma, R ^d  

^a UNIVERSITY OF MINHO   (Portugal)

^b UNIVERSITY OF COIMBRA   (Portugal)

^c UNIVERSITÉ DE POITIERS   (France)

^d TRANSILVANIA UNIVERSITY OF BRASOV   (Romania)

Author keywords

68.55.Jk; 68.55.Ln; 68.55.Nq; 68.60.Bs; 78.20.Ci; 78.66.Sq; 81.15.Aa; 81.15.Cd; Decorative films; Hardness; Phase transitions; TiCxOy coatings; X ray diffraction

Indexed keywords

FLOW RATE; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; PHASE TRANSITIONS; TITANIUM CARBIDE; TITANIUM OXIDES; X RAY DIFFRACTION;

DECORATIVE FILMS; FILM PROPERTIES; STATIC FRICTION COEFFICIENT; TITANIUM OXYCARBIDE;

THIN FILMS;

EID: 33947712699     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.01.030     Document Type: Article

References (33)

1. Dahan I., Admon A., Frage N., Sariel J., Dariel M.P., and Moore J.J. Surf. Coat. Technol. 137 (2001) 111
2. Voevodin A.A., Capano M.A., Laube S.J.P., Donley M.S., and Zabinski J.S. Thin Solid Films 298 (1997) 107
3. Suda Y., Kawasaki H., Doi K., and Hiraishi S. Thin Solid Films 374 (2000) 282
4. Kuo L.-Y., and Shen P. Mater. Sci. Eng., A Struct. Mater.: Prop. Microstruct. Process 276 (2000) 99
5. Chicot D., Benarioua Y., and Lesage J. Thin Solid Films 359 (2000) 228
6. Kubarsepp J., Klaasen H., and Pirso J. Wear 249 (2001) 229
7. Tan K.E., Bratkovsky A.M., Harris R.M., Horsfield A.P., Nguyen-Manh D., Pettifort D.G., and Sutton A.P. Model. Simul. Mater. Sci. Eng. 5 (1997) 187
8. Adjaottor A.A., Meletis E.I., Logothetidis S., Alexandrou I., and Kokkou S. Surf. Coat. Technol. 76-77 (1995) 142
9. Espinosa-Magaña F., Duarte-Moller A., Martínez-Sánchez R., and Miki-Yoshida M. J. Electron Spectrosc. Relat. Phenom. 125 (2002) 119
10. Kusano E., Sato A., kikuchi N., Nanto H., and Kinbara A. Surf. Coat. Technol. 120-121 (1999) 378
11. Fernandes A.C., Vaz F., Rebouta L., Pinto A., Alves E., Parreira N.M.G., Goudeau Ph., Le Bourhis E., and Rivière J.P. Surf. Coat. Technol. 201 (2007) 5587
12. Nakamura M., Kato S., Aoki T., Sirghi L., and Hatanaka Y. Thin Solid Films 401 (2001) 138
13. Yu Konyashin I. Thin Solid Films 278 (1996) 37
14. Kothari D.C., Bonelli M., Miottelo A., and Guzman L. Surf. Coat. Technol. 100-101 (1998) 500
15. Kusano E., Sato A., Kitagawa M., Nanto H., and Kinbara A. Thin Solid Films 343 (1999) 254
16. Colorimetry vol. 15 (1971), CIE Publ. (Commission Internationale de L'Éclairage)
17. Recommendations on Uniform Color Spaces, Difference-difference equations, psychometric color terms, CIE Publication, N° 2-70 (Commission Internationale de L'Éclairage) 15 (1978).
18. Stoney G.G. Proc. R. Soc. Lond., A 82 (1909) 172
19. Glocker D.A., and Shah S.I. Thin Film Process Technology (1995), Institute of Physics Publising Ltd, Bristol, UK
20. Powder Diffraction File, Joint Committee on Power Diffraction Standards (2000), ASTM, Philadelphia, PA Card 32-1383
21. Liepack H., Bartsch K., Brückner W., and Leonhardt A. Surf. Coat. Technol. 183 (2004) 69
22. Precht W., and Czyzniewski A. Surf. Coat. Technol. 174-175 (2003) 979
23. Czyzniewski A., and Precht W. J. Mater. Process. Technol. 157-158 (2004) 274
24. Mani A., Aubert P., Mercier F., Khodja H., Berthier C., and Houdy P. Surf. Coat. Technol. 194 (2005) 190
25. Stüber M., Leiste H., Ulrich S., Hollek H., and Schild D. Surf. Coat. Technol. 150 (2002) 218
26. Zehnder T., and Patscheider J. Surf. Coat. Technol. 133-134 (2000) 133
27. Leonhardt A., Liepack H., and Bartsch K. Surf. Coat. Technol. 133-134 (2000) 186
28. Gulbiński W., Mathur S., Shen H., Suszko T., Gilewicz A., and Warcholiński B. Appl. Surf. Sci. 239 (2005) 302
29. Feng L., Tang J., and Zabinski J.S. Mater. Sci. Eng., A Struct. Mater: Prop. Microstruct. Process. 257 (1998) 240
30. Yua Z., Inagawah K., and Jin Z. Thin Solid Films 264 (1995) 52
31. Guu Y.Y., Lin J.F., and Ai C. Wear 208 (1997) 147
32. Pei Y.T., Galvan D., De Hosson J.Th.M., and Strondl C. J. Eur. Ceram. Soc. 26 (2006) 565
33. Persson B.N.J., Albohr O., Mancosu F., Peveri V., Samoilov V.N., and Sivebaek I.M. Wear 254 (2003) 835