The effect of bombarding conditions on the properties of multifunctional Ti-C-O thin films grown by magnetron sputtering

Surface and Coatings Technology

Volumn 202, Issue 4-7, 2007, Pages 946-951

  Fernandes, A C ^a   Cunha, L ^a   Moura, C ^a   Vaz, F ^a   Carvalho, P ^a   Le Bourhis, E ^b   Goudeau, Ph ^b   Riviere J P ^b   Parreira, N M G ^c  

^a UNIVERSITY OF MINHO   (Portugal)

^b UNIVERSITÉ DE POITIERS   (France)

^c UNIVERSITY OF COIMBRA   (Portugal)

Author keywords

Mechanical properties; Raman; Resistivity; Sputtering; Structure; Titanium oxycarbide

Indexed keywords

AMORPHIZATION; BIAS VOLTAGE; ELECTRIC CONDUCTIVITY; HARDNESS; ION BOMBARDMENT; MAGNETRON SPUTTERING; THIN FILMS; TITANIUM CARBIDE; TITANIUM OXIDES;

TITANIUM OXYCARBIDE;

INORGANIC COATINGS;

AMORPHIZATION; BIAS VOLTAGE; ELECTRIC CONDUCTIVITY; HARDNESS; INORGANIC COATINGS; ION BOMBARDMENT; MAGNETRON SPUTTERING; THIN FILMS; TITANIUM CARBIDE; TITANIUM OXIDES;

EID: 36049013103     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.05.052     Document Type: Article

References (39)

1. Toth E.L. Transition Metal Carbides and Nitrides (1971), Academic Press, New York
2. Zaoui A., Kacimi S., Bouhafs B., and Roula A. Physica, B 358 (2005) 63
3. Soto G. Appl. Surf. Sci. 233 (2004) 115
4. Munteanu D., Cozma R., Borcea B., and Vaz F. J. Opt. Adv. Mater. 8 (2006) 712
5. Santerre F., El Khakani M.A., Chaker M., and Dodelet J.P. Appl. Surf. Sci. 148 (1999) 24
6. Nakamura M., Kato S., Aoki T., Sirghi L., and Hatanaka Y. Thin Solid Films 401 (2001) 138
7. Yu Konyashin I. Thin Solid Films 278 (1996) 37
8. Guzman L., Bonelli M., Miottelo A., and Kothari D.C. Surf. Coat. Technol. 100 (1998) 500
9. Martin P.J., Netterfield R.P., Kinder T.J., and Descôtes L. Surf. Coat. Technol. 49 (1991) 239
10. Kusano E., Satoh A., Kitagawa M., Nanto H., and Kinbara A. Thin Solid Films 344 (1999) 254
11. Stüber M., Leiste H., Ulrich S., Hollek H., and Schild D. Surf. Coat. Technol. 150 (2002) 218
12. Inoue S., Wada Y., and Koterazawa K. Vacuum 59 (2000) 735
13. Kusano E., Sato A., Kikuchi N., Nanto H., and Kinbara A. Surf. Coat. Technol. 120 (1999) 378
14. Wolfe D.E., and Singh J. Surf. Coat. Technol. 124 (2000) 142
15. Nakamura M., Aoki T., and Hatanaka Y. Vacuum 59 (2000) 506
16. Dahan I., Admon A., Frage N., Sariel J., Dariel M.P., and Moore J.J. Surf. Coat. Technol. 137 (2001) 111
17. Voevodin A.A., Capano M.A., Laube S.J.P., Donley M.S., and Zabinski J.S. Thin Solid Films 298 (1997) 107
18. Suda Y., Kawasaki H., Doi K., and Hiraishi S. Thin Solid Films 374 (2000) 282
19. Kuo L.-Y., and Shen P. Mater. Sci. Eng., A Struct. Mater.: Prop. Microstruct. Process. 276 (2000) 99
20. Chicot D., Benarioua Y., and Lesage J. Thin Solid Films 359 (2000) 228
21. Kubarsepp J., Klaasen H., and Pirso J. Wear 249 (2001) 229
22. Lousa A., Martínez E., Esteve J., and Pascual E. Thin Solid Films 355-356 (1999) 210
23. Thobor A., Rousselot C., Clement C., Takadoum J., Martin N., Sanjines R., and Levy F. Surf. Coat. Technol. 124 (2000) 210
24. Migita T., Kamei R., Tanaka T., and Kawabata K. Appl. Surf. Sci. 169-170 (2001) 362
25. Pierson J.F., Tomasella E., and Bauer P. Thin Solid Films 408 (2002) 26
26. Romero J., Gómez M.A., Esteve J., Montalà F., Carreras L., Grifol M., and Lousa A. Thin Solid Films 515 (2006) 113
27. Stoney G.G. Proc. R. Soc. London A 82 (1909) 172
28. Vaz F., Rebouta L., Goudeau P., Rivière J.P., Schäffer E., Kleer G., and Bodmann M. Thin Solid Films, 402 (2002) 195
29. Fernandes A.C., Vaz F., Rebouta L., Pinto A., Alves E., Parreira N.M.G., Goudeau Ph., Le Bourhis E., and Rivière J.P. Surf. Coat. Technol. 201 (2007) 5587
30. Fernandes A.C., Carvalho P., Vaz F., Lanceros-Méndez S., Machado A.V., Parreira N.M.G., Pierson J.F., and Martin N. Thin Solid Films 515 (2006) 866
31. Klein M.V., Holy J.A., and Williams W.S. Phys. Rev., B, 17 (1978) 1546
32. Li Bassi A., Cattaneo D., Russo V., Bottani C.E., Barborini E., Mazza T., Piseri P., Milani P., Ernst F.O., Wegner K., and Pratsinis S.E. J. Appl. Phys. 98 (2005) 074305
33. Karunagaran B., Kim K., Mangalaraj D., Yi J.S., and Velumani S. Sol. Energy Mater. Sol. Cells 88 (2005) 199
34. Swamy V., Muddle B.C., and Dai Q. Appl. Phys. Lett. 89 (2006) 163118
35. Barborini E., Kholmanov I.N., Piseri P., Ducati C., Bottani C.E., and Milani P. Appl. Phys. Lett. 81 (2002) 3052
36. Ferrari A.C., and Robertson J. Phys. Rev., B, 61 (2000) 14095
37. Amer M., Barsoum M.W., El-Raghy T., Weiss I., Leclair S., and Liptak D. J. Appl. Phys. 84 (1998) 5817
38. Bellucci A., Gozzi D., Nardone N., and Sodo A. Chem. Mater, 15 (2003) 1217
39. Mani A., Aubert P., Mercier F., Khodja H., Berthier C., and Houdy P. Surf. Coat. Technol. 194 (2005) 190