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Surface and Coatings Technology

Volumn 204, Issue 6-7, 2009, Pages 1008-1012

Raman spectroscopy as a tool to study cubic Ti-C-N CVD coatings

(4) Dreiling, Ines a Haug, Andrea a Holzschuh, Helga b Chassé, Thomas a

a UNIVERSITY OF TÜBINGEN (Germany)

b Walter AG (Germany)

Author keywords

CVD; Oxidation; Raman spectroscopy; TiC; TiCN; TiN

Indexed keywords

ACOUSTICAL PHONONS; ANNEALING TEMPERATURES; C:N RATIO; CARBON CONTENT; CEMENTED CARBIDES; CHEMICAL COMPOSITIONS; CRYSTALLINITIES; CVD; CVD COATING; DEPOSITION TEMPERATURES; FREQUENCY SHIFT; HIGH TEMPERATURE OXIDATION; HIGHER FREQUENCIES; LASER POWER; LASER RAMAN SPECTROSCOPY; NONDESTRUCTIVE TOOLS; OXIDATION PROCESS; OXIDATION PRODUCTS; OXIDE LAYER; OXIDE LAYER COMPOSITION; QUALITATIVE CHARACTERIZATION; RAMAN SHIFT; SENSITIVE TECHNIQUES; TICN COATINGS; TRIBOCHEMICAL REACTION;

CHEMICAL VAPOR DEPOSITION; COATINGS; OXIDATION RESISTANCE; OXIDE MINERALS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; TEMPERATURE INDICATING CAMERAS; TITANIUM CARBIDE; TITANIUM DIOXIDE; TITANIUM NITRIDE; TITANIUM OXIDES;

OXIDATION;

EID: 71849087794 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2009.05.029 Document Type: Article

Times cited : (76)

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