Niobium pentoxide (Nb2O5) thin films: Rf Power and substrate temperature induced changes in physical properties

Optik

Volumn 126, Issue 19, 2015, Pages 1945-1950

  Usha, N ^a   Sivakumar, R ^a   Sanjeeviraja, C ^b   Arivanandhan, M ^c  

^a ALAGAPPA UNIVERSITY   (India)

^b ALAGAPPA CHETTIAR COLLEGE OF ENGINEERING AND TECHNOLOGY   (India)

^c SHIZUOKA UNIVERSITY   (Japan)

Author keywords

Morphological study; Nb2O5 thin films; Optical property; Sputtering; XPS study

Indexed keywords

AMORPHOUS FILMS; ATMOSPHERIC TEMPERATURE; ENERGY GAP; MAGNETRON SPUTTERING; MORPHOLOGY; NIOBIUM OXIDE; OPTICAL PROPERTIES; SPECTROSCOPIC ANALYSIS; SPUTTERING; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

INTERFERENCE PATTERNS; MORPHOLOGICAL STUDY; RF MAGNETRON SPUTTERING TECHNIQUE; SPECTROSCOPIC STUDIES; SUBSTRATE TEMPERATURE; VARIOUS SUBSTRATES; WAVELENGTH REGIONS; X-RAY PHOTOELECTRONS;

OPTICAL FILMS;

EID: 84940961869     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijleo.2015.05.036     Document Type: Article

References (31)

1. Michel A. Aegerter Sol-gel niobium pentoxide: a promising material for electrochromic coatings, batteries, nanocrystalline solar cells and catalysis Sol. Energy Mater. Sol. Cells 68 2001 401 422
2. M. Serenyi, T. Lohner, P. Petrik, Z. Zolnai, Z.E. Horvath, and N.Q. Khanh Characterization of sputtered and annealed niobium oxide films using spectroscopic ellipsometry, Rutherford backscattering spectrometry and X-ray diffraction Thin Solid Films 516 2008 8096 8100
3. G. Ramirez, S.E. Rodil, S. Muhl, D. Turcio-Ortega, J.J. Olaya, M. Rivera, E. Camps, and L. Escobar-Alarcon Amorphous niobium oxide thin films J. Non-Cryst. Solids 356 2010 2714 2721
4. S. Venkataraj, R. Drease, Ch. Liesch, O. Kappertz, R. Jayavel, and M. Wuttig Temperature stability of sputtered niobium-oxide films J. Appl. Phys. 91 2002 4863 4871
5. 5 films Thin Solid Films 392 2001 184 190
6. 5 films deposited by reactive sputtering Sol. Energy Mater. Sol. Cells 77 2003 155 162
7. Fachun Lai, Ming Li, Haiqian Wang, Hailong Hu, Xiaoping Wang, J.G. Hou, Yizhou Song, and Yousong Jiang Optical scattering characteristic of annealed niobium oxide film Thin Solid Films 488 2005 314 320
8. Benjamin Reichman, and Allen J. Bard Electrochromism at niobium pentoxide electrodes in aqueous and acetonitrile solutions J. Electrochem. Soc. 127 1980 241 242
9. C.K. Dyer, and J.S.L. Lech Reversible optical changes within anodic oxide films on titanium and niobium J. Electrochem. Soc. 125 1978 23 29
10. M.T. Duffy, C.C. Wang, A. Waxman, and K.H. Zaininger Preparation, optical and dielectric properties of vapor-deposited niobium oxide thin films J. Electrochem. Soc. 116 1969 234 239
11. 5 coatings and devices Electrochim. Acta 46 2001 2105 2111
12. Glabbeek Van, and R.E. Van De Leest Thin vapour deposited niobium pentoxide films Thin Solid Films 201 1991 137 145
13. x J. Electrochem. Soc. 137 1990 1444 1451
14. Maisara Othman, Richard Ritikos, Noor Hamizah Khanis, Nur Maisarah Abdul Rashid, Saadah Abdul Rahman, Siti Meriam Ab Gani, and Muhamad Rasat Muhamad Effects of rf power on the structural properties of carbon nitride thin films prepared by plasma enhanced chemical vapour deposition Thin Solid Films 519 2011 4981 4986
15. T. Maruyama, and S. Arai Electrochromic properties of niobium oxide thin films prepared by radio-frequency magnetron sputtering method Appl. Phys. Lett. 63 1993 869 870
16. 5 thin films prepared by RF magnetron sputtering Appl. Surf. Sci. 277 2013 35 39
17. J.F. Chang, H.L. Wang, and M.H. Hon Studying of transparent conductive ZnO:Al thin films by RF reactive magnetron sputtering J. Cryst. Growth 211 2000 93 97
18. 2 thin films Mater. Sci. Semicon. Proc. 15 2012 432 437
19. Tac J. Tauc Master. Res. Bull. 5 1970 721
20. E. Burstein Phys. Rev. 93 1954 632
21. T.S. Moss Proc. Phys. Soc. Lond.; Sec. B 67 1954 775
22. D. Dengyan Song Appl. Surf. Sci. 254 2008 4171 4178
23. K. Yoshimura, T. Miki, S. Iwama, and S. Tanemura Thin Solid Films 281 and 282 1996 235 238
24. 5 nanorods J. Lumin. 128 2008 1369 1372
25. 2 thin films prepared by RF magnetron sputtering Appl. Surf. Sci. 257 2011 10869 10875
26. Nilgun Ozer, Michael D. Rubin, and Carl M. Lampert Optical and electrochemical characteristics of niobium oxide films prepared by sol-gel process and magnetron sputtering - a comparison Sol. Energy Mater. Sol. Cells 40 1996 285 296
27. 5 electrodes prepared by thermal oxidation of niobium J. Electrochem. Soc. 137 1990 3067 3070
28. Y.M. Lu, W.S. Hwang, W.Y. Liu, and J.S. Yang Effect of rf power on optical and electrical properties of ZnO thin film by magnetron sputtering Mater. Chem. Phys. 72 2001 269 272
29. 3 transparent conductive films by RF magnetron sputtering Appl. Surf. Sci. 275 2013 227 232
30. A. Ann McConnell, J.S. Anderson, and C.N.R. Rao Spectrochim. Acta 32A 1975 1067 1076
31. 5 J. Mater. Sci. Lett. 1 1982 374 376