Substrate temperature effect on structural, optical and electrical properties of vacuum evaporated SnO 2 thin films

Materials Science in Semiconductor Processing

Volumn 15, Issue 4, 2012, Pages 432-437

  Zadsar, Mehdi ^a   Fallah, Hamid Reza ^a   Haji Mahmoodzadeh, Morteza ^a   Hassanzadeh, Ali ^b   Ghasemi Varnamkhasti, Mohsen ^a  

^a UNIVERSITY OF ISFAHAN   (Iran)

^b URMIA UNIVERSITY   (Iran)

Author keywords

Electrical properties; Optical transmission; Substrate temperature; Tin oxide films; Transparent conductive oxide

Indexed keywords

CRYSTALLINITIES; DIFFERENT SUBSTRATES; DIRECT BAND GAP; GLASS SUBSTRATES; GRAIN SIZE; HIGH TRANSPARENCY; HIGHER TEMPERATURES; OPTICAL AND ELECTRICAL PROPERTIES; REDUCED RESISTIVITY; RMS ROUGHNESS; SCANNING ELECTRON MICROSCOPY IMAGE; SMOOTH SURFACE; SUBSTRATE TEMPERATURE; SUBSTRATE TEMPERATURE EFFECT; TRANSPARENT CONDUCTIVE OXIDES; VISIBLE WAVELENGTHS;

AMORPHOUS FILMS; ELECTRIC PROPERTIES; LIGHT TRANSMISSION; OXIDE FILMS; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THERMAL EVAPORATION; THIN FILMS; TIN; TIN OXIDES; X RAY DIFFRACTION;

FILM PREPARATION;

EID: 84863312787     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2012.02.011     Document Type: Article

References (27)

1. The Joint Committee on Powder Diffraction Standards (JCPDS), Card No. 77-0452, International Centre for Diffraction Data (ICDD), Swarthmore, PA, USA, 1978.
2. B. Thangaraju Thin Solid Films 402 2002 71 78
3. I.H. Kim, J.H. Ko, D. Kim, K.S. Lee, T.S. Lee, and J.-h. Jeong Thin Solid Films 515 2006 2475 2480
4. Y.M. Lu, and C.P. Hu Journal of Alloys and Compounds 449 2008 389 392
5. S.S. Srinivasan, J. Wade, E.K. Stefanakos, and Y. Goswami Journal of Alloys and Compounds 424 2006 322 326
6. D. Vaufrey, M. Ben Khalifa, M.P. Besland, C. Sandu, M.G. Blanchin, and V. Teodorescu Synthetic Metals 127 2002 207 211
7. M.R. Yang, S.Y. Chu, and R.C. Chang Sensors and Actuators B 122 2007 269 273
8. S. Peng, F. Cheng, J. Liang, Z. Tao, and J. Chen Journal of Alloys and Compounds 481 2009 786 791
9. D. Paul Joseph, P. Renugambal, M. Saravanan, S. Philip Raja, and C. Venkateswaran Thin Solid Films 517 2009 6129 6136
10. F. Yu, D. Tang, K. Hai, Zh. Luo, Y. Chen, and X. He Journal of Crystal Growth 312 2010 220 225
11. A.F. Khan, M. Mehmood, M. Aslam, and M. Ashraf Applied Surface Science 256 2010 2252 2258
12. M.A. Gubbins, V. Casey, and S.B. Newcomb Thin Solid Films 405 2002 270 275
13. T. Tsuchiya, K. Daoudi, I. Yamaguchi, T. Manabe, T. Kumagai, and S. Mizuta Applied Surface Science 247 2005 145 150
14. W. Hamd, Y.C. Wu, A. Boulle, E. Thune, and R. Guinebretière Thin Solid Films 518 2009 1 5
15. N.M. Shaalan, T. Yamazaki, and T. Kikuta Sensors and Actuators B: Chemical 153 2011 11 16
16. D. Miao, Q. Zhao, Sh. Wu, Zh. Wang, X. Zhang, and X. Zhao Journal of Non-Crystalline Solids 356 2010 2557 2561
17. E. Gagaoudakis, M. Bender, E. Douloufakis, N. Katsarakis, E. Natasakou, and V. Cimalla Sensors and Actuators B 80 2001 155 161
18. P.S. Patil, R.K. Kawar, T. Seth, D.P. Amalnerkar, and P.S. Chigare Ceramics International 29 2003 725 734
19. Z. Remes, M. Vanecek, H.M. Yates, P. Evans, and D.W. Sheel Thin Solid Films 517 2009 6287 6289
20. V. Vasu, and A. Subrahmanyam Thin Solid Films 189 1990 217 225
21. R.R. Kasar, N.G. Deshpande, Y.G. Gudage, J.C. Vyas, and R. Sharma Physica B 403 2008 3724 3729
22. A.V. Moholkar, S.M. Pawar, K.Y. Rajpure, and C.H. Bhosale Journal of Alloys and Compounds 455 2008 440
23. J.C. Manifacier, J. Gasiot, and J.P. Fillard Journal of Physics E 9 1976 1002 1004
24. S.H. Oh, D.J. Kim, S.H. Hahn, and E.J. Kim Materials Letters 57 2003 4151 4155
25. K.L. Chopra, S. Major, and D.K. Pandya Thin Solid Films 102 1983 1 46
26. T. Serin, N. Serin, S. Karadeniz, H. Sar, N. Tugluoglu, and O. Pakma Journal of Non-Crystalline Solids 352 2006 209 215
27. G. Haacke Journal of Applied Physics 47 1976 4086 4089