Optical scattering characteristic of annealed niobium oxide films

Thin Solid Films

Volumn 488, Issue 1-2, 2005, Pages 314-320

  Lai, Fachun ^a,b   Li, Ming ^a   Wang, Haiqian ^a   Hu, Hailong ^a   Wang, Xiaoping ^a   Hou, J G ^a   Song, Yizhou ^c   Jiang, Yousong ^c  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b FUJIAN NORMAL UNIVERSITY   (China)

^c Shincron Co Ltd   (Japan)

Author keywords

Niobium oxide; Optical coatings; Optical properties; Surface roughness

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; MAGNETRON SPUTTERING; MICROCRACKS; MICROSTRUCTURE; OPTICAL COATINGS; OPTICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS;

ANNEALING TEMPERATURE; NIOBIUM OXIDE; OPTICAL LOSSES; OPTICAL SCATTERING;

NIOBIUM COMPOUNDS;

EID: 23044445318     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.04.036     Document Type: Article

References (22)

1. F. Richter, H. Kupfer, P. Schlott, T. Gessner, and C. Kaufmann Thin Solid Films 389 2001 278
2. C.C. Lee, C.L. Tien, and J.C. Hsu Appl. Opt. 41 2002 2043
3. D. Rosenfeld, R. Sanjinés, F. Lévy, P.A. Buffat, V. Demarne, and A. Grisel J. Vac. Sci. Technol. A12 1994 135
4. T. Lindström, J. Isidorsson, and G.A. Niklasson J. Appl. Phys. 87 2000 4562
5. R. Bruggemann, P. Reinig, and M. Holling Thin Solid Films 427 2003 358
6. A.F. Dericioglu, and Y. Kagawa J. Eur. Ceram. Soc. 23 2003 951
7. S. Venkataraj, R. Drese, Ch. Liesch, O. Kappertz, R. Jayavel, and M. Wuttig J. Appl. Phys. 91 2002 4863
8. B. Hunsche, M. Vergöhl, H. Neuhäuser, F. Klose, B. Szyszka, and T. Matthée Thin Solid Films 392 2001 184
9. J. Edlinger, J. Ramm, and H.K. Pulker Thin Solid Films 175 1989 207
10. N. Martin, C. Rousselot, D. Rondot, F. Palmino, and R. Mercier Thin Solid Films 300 1997 113
11. C.C. Ting, S.Y. Chen, and D.M. Liu J. Appl. Phys. 88 2000 4628
12. Frevel, and Rinn Anal. Chem. 27 1955 1329 (Reference No. 28-0317 in PCPDFWIN (Version 2.02). JCPDS-International Centre for Diffraction Data)
13. S. Tamura Z. Anorg. Allg. Chem. 410 1974 313 (Reference No.30-0873 in PCPDFWIN (Version 2.02). JCPDS-International Centre for Diffraction Data)
14. R. Norin Acta Chem. Scand. 20 1966 871 (Reference No. 73-1610 in PCPDFWIN (Version 2.02). JCPDS-International Centre for Diffraction Data)
15. R. Swanepoel J. Phys. E: Sci. Instrum. 16 1983 1214
16. S.C. Chiao, B.G. Bovard, and H.A. Macleod Appl. Opt. 34 1995 7355
17. Essential Macleod, Thin Film Center Inc., Tucson, AZ, USA http://www.thinfilmcenter.com.
18. H.A. Macleod Thin-Film Optical Filters third ed. 2001 Institute of Physics Publishing London
19. A. Poruba, A. Fejfar, Z. Remes, J. Springer, M. Vanecek, J. Kocka, J. Meier, P. Torres, and A. Shah J. Appl. Phys. 88 2000 148
20. Krc Janez, Franc Smole, and Marko Topic Prog. Photovolt: Res. Appl. 11 2003 15
21. Francis A. Jenkins, and Harvey E. White Fundaments of Optics fourth ed. 1976 McGraw-Hill Inc. New York
22. P. Beckmann, and A. Spizzichino The Scattering of Electromagnetic Wave from Rough Surface 1963 Pergamon Oxford