Effects of rf power on surface-morphological, structural and electrical properties of aluminium-doped zinc oxide films by magnetron sputtering

Applied Surface Science

Volumn 254, Issue 13, 2008, Pages 4171-4178

  Song, Dengyuan ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

Al doped zinc oxide; Raman spectroscopy; Sputtering; X ray photoelectron spectroscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; OXIDE FILMS; RAMAN SPECTROSCOPY; SURFACE MORPHOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

RADIO-FREQUENCY POWERS; WURTZITE PHASE;

ZINC OXIDE;

EID: 41749115708     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.12.061     Document Type: Article

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