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Volumn 277, Issue , 2013, Pages 35-39
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The optical and structural properties of amorphous Nb 2 O 5 thin films prepared by RF magnetron sputtering
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Author keywords
Optical properties; Refractive index; RF magnetron sputtering; Surface roughness
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Indexed keywords
AMORPHOUS FILMS;
ATMOSPHERIC TEMPERATURE;
MAGNETRON SPUTTERING;
NIOBIUM OXIDE;
OPTICAL PROPERTIES;
REFRACTIVE INDEX;
SUBSTRATES;
SURFACE ROUGHNESS;
THIN FILMS;
DEPOSITION PRESSURES;
HIGH TEMPERATURE GLASS;
REACTIVE RF MAGNETRON SPUTTERING;
REFRACTIVE INDEX INCREASE;
RF-MAGNETRON SPUTTERING;
SPUTTERING CONDITIONS;
STRUCTURAL AND OPTICAL PROPERTIES;
SUBSTRATE TEMPERATURE;
OPTICAL FILMS;
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EID: 84878018099
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2013.03.116 Document Type: Article |
Times cited : (67)
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References (13)
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