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Volumn 277, Issue , 2013, Pages 35-39

The optical and structural properties of amorphous Nb 2 O 5 thin films prepared by RF magnetron sputtering

Author keywords

Optical properties; Refractive index; RF magnetron sputtering; Surface roughness

Indexed keywords

AMORPHOUS FILMS; ATMOSPHERIC TEMPERATURE; MAGNETRON SPUTTERING; NIOBIUM OXIDE; OPTICAL PROPERTIES; REFRACTIVE INDEX; SUBSTRATES; SURFACE ROUGHNESS; THIN FILMS;

EID: 84878018099     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2013.03.116     Document Type: Article
Times cited : (67)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.