Characterization of sputtered and annealed niobium oxide films using spectroscopic ellipsometry, Rutherford backscattering spectrometry and X-ray diffraction

Thin Solid Films

Volumn 516, Issue 22, 2008, Pages 8096-8100

  Serenyi M ^a   Lohner, T ^a   Petrik, P ^a   Zolnai, Z ^a   Horvath Z E ^a   Khanh N Q ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

Ellipsometry; Niobium oxide; Optical properties; Radio frequency sputtering; Rutherford backscattering spectrometry; X ray diffraction

Indexed keywords

NIOBIUM; NIOBIUM COMPOUNDS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPECTROSCOPIC ELLIPSOMETRY; SPUTTER DEPOSITION; TRANSITION METALS;

ELLIPSOMETRY; NIOBIUM OXIDE; NIOBIUM OXIDES; OPTICAL PROPERTIES; RADIO FREQUENCY SPUTTERING; RUTHERFORD BACKSCATTERING SPECTROMETRY; X-RAY DIFFRACTION;

OXIDE FILMS;

EID: 50649116580     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.04.070     Document Type: Article

References (17)

1. Richter F., Kupfer H., Schlott P., Gessner T., and Kaufmann C. Thin Solid Films 389 (2001) 278
2. Lira-Cantu M., and Krebs F.C. Sol. Energy Mater. Sol. Cells 90 (2006) 2076
3. Szymanowski H., Zabeida O., Klemberg-Sapieha J.E., and Martinu L. J. Vacuum Science and Technology A 23 (2005) 241
4. Lai F., Lin L., Huang Z., Gai R., and Qu Y. Appl. Surf. Sci. 253 (2006) 1801
5. Masse J.-P., Szymanowski H., Zabeida O., Amassian A., Klemberg-Sapieha J.E., and Martinu L. Thin Solid Films 515 (2006) 1674
6. Venkataraj S., Drese R., Liesch Ch., Kappertz O., Jayavel R., and Wuttig M. J. Appl. Phys. 91 (2002) 4863
7. O'Neill S.A., Parkin I.P., Clark R.J.H., Mills A., and Elliott N. J. Mater. Chem. 13 (2003) 2952
8. Maruyama T., and Arai S. Appl. Phys. Lett. 63 (1993) 870
9. Volk J., Fried M., Polgár O., and Bársony I. Phys. Stat. Sol. (a) 197 (2003) 208
10. Bakalova S., Szekeres A., Grigorescu S., Axente E., Socol G., and Mihailescu I.N. Appl. Phys. A 85 (2006) 99
11. Nagy N., Deák A., Hórvölgyi Z., Fried M., Agod A., and Bársony I. Langmuir 22 (2006) 8416
12. Kruse C., Gartner M., Gust A., and Hommel D. Appl. Phys. Lett. 90 (2007) Art. No. 221102
13. Budai J., Tóth Z., Juhász A., Szakács G., Szilágyi E., Veres M., and Koós M. J. Appl. Phys. 100 (2006) 043501
14. Kótai E. Nucl. Instr. and Methods B 85 (1994) 588
15. Tauc J., Grigorovici R., and Vancu A. physica status solidi 15 (1966) 627
16. Tauc J. In: Nudelman S., and Mitra S.S. (Eds). Optical Properties of Solids (1969), Plenum Press, New York 551
17. Jellison Jr. G.E., and Modine F.A. Appl. Phys. Lett. 69 (1996) 371