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Volumn 3, Issue 28, 2015, Pages 7455-7462

High density and patternable growth of silicon, germanium and alloyed SiGe nanowires by a rapid anneal protocol

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; GERMANIUM; LITHOGRAPHY;

EID: 84938153687     PISSN: 20507534     EISSN: 20507526     Source Type: Journal    
DOI: 10.1039/c5tc01389e     Document Type: Article
Times cited : (6)

References (58)
  • 47
    • 84938075006 scopus 로고
    • ASM International, Materials Park, OH
    • J. R. Davis, L. A. Abel and ASM international committee, Metals handbook, ASM International, Materials Park, OH, 1990, vol. 2, pp. 77-152
    • (1990) Metals handbook , vol.2 , pp. 77-152
    • Davis, J.R.1    Abel, L.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.