Parylene-Based Electrochemical-MEMS Force Sensor for Studies of Intracortical Probe Insertion Mechanics

Journal of Microelectromechanical Systems

Volumn 24, Issue 5, 2015, Pages 1534-1544

  Kim, Brian J ^a   Gutierrez, Christian A ^b   Meng, Ellis ^a  

^a University of Southern California ^*  (United States)

^b Fluid Synchrony   (United States)

Author keywords

electrochemical sensing; electrochemical transduction; electrochemical microelectro mechanical systems (EC MEMS); Force sensor; impedance based sensor; liquid impedance; mechanotransduction.; Parylene C

Indexed keywords

BRAIN; ELECTRODES; ELECTROMECHANICAL DEVICES; INTELLIGENT AGENTS; MEMS; MICROCHANNELS; PROBES; TISSUE;

CONDUCTION PATHS; CONTACTING FORCE; DISTRIBUTED SENSOR; ELECTROCHEMICAL IMPEDANCE; INTERFACIAL FORCES; MECHANICAL INTERACTIONS; PLATINUM ELECTRODES; SENSING ELECTRODE;

ELECTROCHEMICAL ELECTRODES;

EID: 84928041786     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2015.2420043     Document Type: Article

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