Effect of thermal and deposition processes on surface morphology, crystallinity, and adhesion of Parylene-C

Sensors and Materials

Volumn 20, Issue 2, 2008, Pages 87-102

  Hsu, Jui Mei ^a   Rieth, Loren ^b   Kammer, Sascha ^c   Orthner, Mike ^b   Solzbacher, Florian ^a,b  

^a UNIVERSITY OF UTAH   (United States)

^b University of Utah   (United States)

^c FRAUNHOFER INSTITUTE FOR BIOMEDICAL ENGINEERING   (Germany)

Author keywords

Adhesion; Crystallinity; CVD thin film; Parylene C; Surface morphology

Indexed keywords

EID: 46049095897     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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