Annealing effects on flexible multi-layered parylene-based sensors

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2014, Pages 825-828

  Kim, Brian J ^a   Washabaugh, E Peter ^b   Meng, Ellis ^a  

^a University of Southern California   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTROCHEMICAL PROPERTIES; MEMS; MICROELECTRODES;

AFTER-HEAT TREATMENT; ANNEALING EFFECTS; DELAMINATION FAILURE; DEVICE PERFORMANCE; ELECTRODE SURFACES; MECHANICAL RESPONSE; SENSING PERFORMANCE; SENSOR SENSITIVITY;

SENSORS;

EID: 84899006636     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2014.6765768     Document Type: Conference Paper

References (12)

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