A dual function Parylene-based biomimetic tactile sensor and actuator for next generation mechanically responsive microelectrode arrays

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 2194-2197

  Gutierrez, C A ^a   Meng, E ^a  

^a UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

Movable electrodes; Parylene C; Tactile sensing

Indexed keywords

CHANNEL STRUCTURES; DUAL FUNCTION; GAS GENERATION; INTERDIGITATED MICROELECTRODES; MECHANOTRANSDUCTION; MICRO-CHAMBERS; MICROELECTRODE ARRAY; MOVABLE ELECTRODES; MULTI-MODAL; NEURAL TISSUE; OUT-OF-PLANE; PARYLENE C; PARYLENES; TACTILE FORCES; TACTILE SENSING; TACTILE SENSORS;

ACTUATORS; BIOMIMETICS; GAS SENSING ELECTRODES; MICROELECTRODES; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; SURFACE DEFECTS;

SOLID-STATE SENSORS;

EID: 71449096060     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285612     Document Type: Conference Paper

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