An implantable all-parylene liquid-impedance based MEMS force sensor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 600-603

  Gutierrez, Christian A ^a   McCarty, Connor ^a   Kim, Brian ^b   Pahwa, Mrinal ^c   Meng, Ellis ^a  

^a UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

^b DUKE UNIVERSITY   (United States)

^c UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMICAL IMPEDANCE; ENGINEERING CHALLENGES; HIGHLY SENSITIVE; IN-SITU; IN-VIVO MEASUREMENT; INTERFACIAL FORCES; MEMS FORCES; MEMS-STRUCTURE; NEURAL PROSTHETIC; NON-PLANAR SURFACES; PARYLENES;

BIOMECHANICS; MECHANICAL ENGINEERING; SENSORS; TISSUE ENGINEERING;

REACTIVE ION ETCHING;

EID: 77952763685     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442335     Document Type: Conference Paper

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