Design and fabrication of a diaphragm type thermo-buckled microactuators

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Volumn , Issue , 2006, Pages 873-876

  Wang, Jiun Min ^a   Lin, Hung Hua ^a   Lin, Yue Jheng ^a   Ou, Yu Cheng ^a   Yang, Lung Jieh ^a   Lin, Chii Wann ^b   Yang, Yao Joe ^b   Lin, Wei Chih ^c  

^a TAMKANG UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Microactuator; Parylene; Thermo buckled

Indexed keywords

ACTUATORS; CUTOFF FREQUENCY; MICROACTUATORS; MOLECULAR BEAM EPITAXY; MOLECULES; NEMS; OPTICAL DESIGN; PLATINUM; RESISTORS;

BOTTOM LAYERS; BUCKLING DEFORMATIONS; DEFLECTION (OVALIZATION); DRIVING VOLTAGES; HEATING SOURCES; INTERNATIONAL CONFERENCES; MAXIMUM DISPLACEMENT; MICRO ACTUATORS; MOLECULAR SYSTEMS; NON-UNIFORM TEMPERATURE; OUT OF PLANE; PARYLENE; WORKING TEMPERATURES;

DIAPHRAGMS;

EID: 46149087773     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2006.334555     Document Type: Conference Paper

References (8)

1. H. Guckel, J. Klein, T. Christenson and K.Skrobis, "Thermo-Magnetic Metal Flexure Actuators," Proc. Transducers'92, pp.73-75.
2. Wen-Chih Chen, Jerwei Hsieh and Weileun Fang, "A Novel Single-layer Bi-directional Out-of-plane Electrothermal Microactuator," Proc. MEMS 2002, pp.693-697, or Sensors and Actuators A, vol. 103, pp. 48-58, 2003.
3. J. W. L. Zhou, H. Y. Chan, T. K. H. To, K. W. C. Lai and W. J. Li, "Polymer MEMS actuators for underwater micromanipulation" Transactions on Mechatronics, vol. 9, Issue 2, pp. 334-342, 2004.
4. H. Y. Chan and W. J. Li, "Design and Fabrication of A Micro Thermal Actuator for Cellular Grasping "Acta Mechanica Sinica/Lixue Xuebao, vol. 20, Issue 2, pp.132-139, 2004.
5. T. Seki, M. Sakata, T. Nakajima and M. Matsumoto, "Thermal Buckling Actuator for Micro Relays," Proc. Transducers'97, pp.1153-1156.
6. E. Stemme and G. Stemme, "A Valveless Diffuser/Nozzle-based Fluid Pumps," Sensors and Actuators A, vol. 39, pp. 159-167, 1993.
7. A. Olsson, G. Stemme and E. Stemme, "A Valve-less Planar Fluid Pump With 2 Pump Chambers," Sensors and Actuators A, vol. 47, pp. 549-556, 1995.
8. A. Olsson, P. Enoksson, G. Stemme and E. Stemme, "A Valve-less Planar Pump Isotropically Etched in Silicon," Journal of Micromechanical and Microengineering, vol. 6, pp. 87-91, 1996.