Adhesion-enhancing surface treatments for parylene deposition

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 390-393

  Chang, Jay Han Chieh ^a   Lu, Bo ^a   Tai, Yu Chong ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Adhesion; Parylene C; Peeling Test

Indexed keywords

BIOCOMPATIBLE COATINGS; BIOMEDICAL DEVICES; BUBBLE DENSITY; COATED SURFACE; HYDROPHOBIC SURFACES; INTERFACE ADHESION; MEMS PROCESS; PARYLENE C; PARYLENES; PEELING TEST; PROPYLENE CARBONATE; TETRAFLUOROMETHANE;

ACTUATORS; HEXANE; HYDROPHOBICITY; MICROSYSTEMS; PHOTORESISTS; PROPYLENE; SOLID STATE DEVICES; SOLID-STATE SENSORS; SURFACE CHEMISTRY; SURFACE CLEANING; SURFACE TREATMENT; TOLUENE;

ADHESION;

EID: 80052126656     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969484     Document Type: Conference Paper

References (7)

1. J-M. Hsu et al., "Characterization of Parylene-C Film as an Encapsulation Material for Neural Interface Devices," Conference on Multi-Material Micro Manufacture, 2007. PID374451
2. T. Stieglitz et al., "Encapsulation of Flexible Biomedical Microimplants with Parylene C," IFESS 2002, 5.21
3. Jay H.C. Chang, Ray Huang, and Y.C. Tai, "High-Density IC Chip Integration with Parylene Pocket", NEMS 2011, Kaosiung, Taiwan, Feb. 21-23, 2011.
4. D. C. Rodger, W. Li, H. Ameri, A. Ray, J. D. Weiland, M. S. Humayun, and Y. C. Tai, "Flexible parylene-based microelectrode technology for intraocular retinal prostheses," in IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2006.
5. R. Huang, YC. Tai, "Parylene to Silicon Adhesion Enhancement", The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2009
6. L. T. Zhuravlev, "Structurally Bound Water and Surface Characterization of Amorphous Silica," Pure & Appl. Chem. 1989, Vol. 61, No. 11, pp 1969-1976
7. Wikipedia. Arrhenius Equation. Available: Http://en.wikipedia.org/wiki/ Arrhenius-equationb