Robust control design for an uncertain electrostatic micro-mechanical system via loop shaping

2007 European Control Conference, ECC 2007

Volumn , Issue , 2007, Pages 389-394

  Zolotas, Argyrios C ^a   Tzes, Anthony ^b   Vagia, Marialena ^b  

^a LOUGHBOROUGH UNIVERSITY   (United Kingdom)

^b UNIVERSITY OF PATRAS   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC ACTUATORS; ELECTROSTATICS; MACHINE DESIGN; MECHANICAL ACTUATORS; ROBUST CONTROL; UNCERTAINTY ANALYSIS;

BIFURCATION POINTS; FEED-FORWARD COMPENSATOR; MICROMECHANICAL SYSTEMS; MULTIPLE OPERATING POINTS; ROBUST CONTROL DESIGNS; SET-POINT REGULATION; SIMULATION STUDIES; UNCERTAIN PARAMETERS;

CONTROLLERS;

EID: 84927722773     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.23919/ecc.2007.7068945     Document Type: Conference Paper

References (32)

1. J. W. Judy, "Microelectromechanical systems (MEMS): fabrication, design and applications," in Smart materials and Structures, vol. 10, pp. 1115-1134, 2001.
2. L. A. Rocha, E. Cretu and R. F. Wolffenbuttel, "Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning," in Journal of Microelectromechanical Systems, vol. 15, pp. 69-83, 2006.
3. M. S. C. Lu and G. Fedder, "Position Control of Parallel-Plate Microactuators for Probe-Based Data Storage," Journal of microelectromechanical Systems., vol. 13, pp. 759-769, 2004.
4. A. Menciassi and A. Eisinberg and I. Izzo and P. Dario, "From "macro" to "micro" Manipulation: Models and Experiments," in IEEEASME Transactions on Mechatronics, vol. 9, pp. 311-320, 2004.
5. M. Sitti, "Survey of Nanomanipulation Systems," IEEENanotechnology Conference, pp. 75-80, November 2001.
6. H. Ishihara, F. Arai, and T. Fukuda, "Micro mechatronics and micro actuators," IEEE/ASME Transactions on Mechatronics, vol. 1, pp. 68-79, March 1996.
7. S. Chang, "Demonstration of robust micromachined jet technology and its application to realistic flow control problems," in Journal of Mechanical Science and Technology, vol. 20, pp. 554-560, 2006.
8. A. Agarwal, S. Sridharamurthy,D. Beebe, et al "Programmable autonomous micromixers and micropumps," in IEEE Journal of Microelectromechanical Systems,vol. 14, pp. 1409-1421, 2005.
9. A. Ketsdever, R. Lee and T. Lilly "Performance testing of a microfabricated propulsion system for nanosatellite applications," in Journal of Micromechanics and Microengineering, vol. 15, pp. 2254-2263, 2005.
10. Y. Shao, D. L. Dickensheets and P. Himmer "3-D MOEMS mirror for laser beam pointing and focus control," in IEEE Journal of Selected Topics in Quantum Electronics, vol. 10, pp. 528-535, 2004.
11. E. Chen and R. W. Dutton, "Electrostatic Micromechanical Actuator with extended range of travel," Journal of microelectromechanical Systems., vol. 9, pp. 321-328, 2000.
12. M. Madou, Fundamentals of Microfabrication. Boca Raton, FL: Chemical Rubber Company,1997.
13. E. Lyshevski, "Microelectromechanical systems: Motion control of microactuators.," in IEEE/ASME Transactions on Mechatronics Proceedings of the IEEE Conference on Decision and Control, 1998.
14. F Najar, S Choura, S El-Borgi, E M Abdel-Rahman and A H Nayfeh, "Modeling and design of variable-geometry electrostatic microactuators," Micromech. Microeng, vol. 15, 2005, pp. 419-429.
15. D. McFarlane, K. Glover, A loop-shaping design procedure using H∞ synthesis, IEEE Trans. Autom. Control., vol. 37, 1992, pp. 759-769.
16. K. Glover, D. McFarlane, Robust stabilization of normalized coprime factor plant descriptions with H∞-bounded uncertainty, IEEE Trans. Autom. Control.,vol. 34, 1989, pp. 821-830.
17. D. McFarlane, K. Glover, Robust controller design using normalized coprime factor plant descriptions, Lect Notes Control Inf Sci., 1990.
18. D. McFarlane, K. Glover, M. Vidyasagar, Reduced-order controller design using coprime factor model reduction, IEEE Trans. Autom. Control., vol. 35, 1990, pp. 369-373.
19. M. Vidyasagar, Control System Synthesis-A Coprime Factorisation Approach, MIT Press, 1985.
20. C. Du, G. Guo, D. Wu, Low-hump sensitivity function design for dualstage HDD systems with different microactuators, IEE Proc.-Control Theory Appl., Vol. 152, No. 6, 2005, pp. 655-661.
21. S. Skogestad and I. Postlethwaite, Multivariable Feedback Control: Analysis and Desgn, Wiley, 2000.
22. H. K. Khalil, Nonlinear Systems, Pearson Education Int'l, New Jersey; 2000.
23. A. Lee, C. McConaghy, G. Sommargren, P. Krulevitch, and E. Campbell, "Vertical-actuated electrostatic comb drive with in situ capacitive position correction for application in phase shifting diffraction interferometry," Journal of Microelectromechanical Systems, vol. 12, pp. 960-971, December 2003.
24. H. Liu, B. Lu, Y. Ding, Y. Tang, and D. Li, "A motor-piezo actuator for nano-scale positioning based on dual servo loop and nonlinearity compensation," Journal of Micromechanics and Microengineering, vol. 13, pp. 295-299, March 2003.
25. H. Zhang, A. Laws, V. Bright, K. Gupta, and Y. Lee, "MEMS variable-capacitor phase shifters Part I: Loaded-line phase shifter," International Journal of RF and Microwave Computer-Aided Engineering, vol. 13, pp. 321-337, July 2003.
26. L. Sung Q. K. Yongsang and G. Dae-Gab, "Continuous gain scheduling control for a micro-positioning system: Simple, robust and no overshoot response," Control Engineering Practice, vol. 8,pp. 133-138, 2000.
27. S. Hong, V. Varadan, and V. Varadan, "Implementation of coupled mode optimal structural vibration control using approximated eigenfunctions," Smart Material Structures, vol. 7, pp. 63-71, 1998.
28. A. S. Oja, J. Kyynarainen, H. Seppa, T. Lampola, A Micromechanical Dc-Voltage Reference, Conference on Electromagnetic Measurements Digest, 2000.
29. M. Zarubinskaya and W. Horssen, "On the free vibrations of a rectangular plate with two opposite sides simply supported and the other sides attached to linear springs," report 03-09, DELFT University of Technology, 2003.
30. D. H. S. Maithripala, J. M. Bergand and W. P. Dayawansa, "A port controlled hamiltonian appoach to control of an electrostatic MEMS actuator," In proceedings of the ASME International Mechanical Enginnering Congress and Exposition, (Washington, DC USA), November 2003.
31. A. Tzes, G. Nikolakopoulos, L. Dritsas, and Y. Koveos, "Multi-parametric H∞ control of a actuator," In the Proceedings of the 2005 IFAC World Congress, (Prague, Czech), no. 4455, July 2005.
32. Vagia M, Nikolakopoulos G and Tzes A Intelligent Robust Controller Design for a Micro-Actuator Journal of Intelligent and Robotic Systems, Vol. 47, No. 4, pp. 299-315, 2006.