Micromechanical DC-voltage reference

CPEM Digest (Conference on Precision Electromagnetic Measurements)

Volumn , Issue , 2000, Pages 701-702

  Oja, A S ^a   Kyynarainen, J ^a   Seppa, H ^a   Lampola, T ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTICITY; ELECTRIC POTENTIAL; ELECTROSTATICS; SEMICONDUCTING SILICON;

DIRECT CURRENT VOLTAGE REFERENCE;

MICROELECTROMECHANICAL DEVICES;

EID: 0033695610     PISSN: 05891485     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)